A surface micromachined electrostatic ultrasonic air transducer

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

Volumn 43, Issue 1, 1996, Pages 1-6

  Haller, Matthew I ^a   Khuri Yakub, Butrus T ^a  

^a STANFORD UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AIR; BANDWIDTH; CAPACITORS; ELECTROSTATICS; EQUIVALENT CIRCUITS; LEAD COMPOUNDS; MATHEMATICAL MODELS; MICROMACHINING; SEMICONDUCTOR DEVICE STRUCTURES; SILICON NITRIDE; SUBSTRATES; SURFACES;

CIRCULAR SILICON NITRIDE MEMBRANE; ELECTRICAL EQUIVALENT CIRCUIT MODEL; ELECTROSTATIC ACTUATION; ELECTROSTATIC TRANSDUCER; LEAD ZIRCONIUM TITANATE;

ULTRASONIC TRANSDUCERS;

EID: 0029735326     PISSN: 08853010     EISSN: None     Source Type: Journal    
DOI: 10.1109/58.484456     Document Type: Article

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