Characterization and modeling of metal-film microbolometer

Journal of Microelectromechanical Systems

Volumn 5, Issue 4, 1996, Pages 298-306

  Shie, Jin Shown ^b,c,d,e   Chen, Yeong Maw ^a,b,f   Ou Yang, Mang ^a,b   Chou, Bruce C S ^a,b,g,h  

^a IEEE

^b NATIONAL CHIAO TUNG UNIVERSITY   (Taiwan)

^c NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

^d Stony Brook University   (United States)

^e Inst of Electro Optical Engineering

^f NATIONAL CENTRAL UNIVERSITY   (Taiwan)

^g TUNGHAI UNIVERSITY   (Taiwan)

^h NATIONAL TSING HUA UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

DESIGN; EXPERIMENTS; METALLIC FILMS; PLATINUM; SIMULATION; THERMODYNAMIC PROPERTIES;

ELECTRO-THERMAL MODEL; METAL-FILM MICROBOLOMETER;

BOLOMETERS;

EID: 0030405360     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/84.546409     Document Type: Article

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