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Volumn 541, Issue 1-2, 2005, Pages 274-285
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Future semiconductor detectors using advanced microelectronics with post-processing, hybridization and packaging technology
a
CERN
(Switzerland)
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Author keywords
3D technology; LHC; Silicon pixel detector; Tracking vertex detector; Vector detector
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Indexed keywords
CMOS INTEGRATED CIRCUITS;
COLLIDING BEAM ACCELERATORS;
ELECTRONICS PACKAGING;
MICROELECTRONICS;
RADIATION HARDENING;
SILICON SENSORS;
SILICON WAFERS;
VECTORS;
3D TECHNOLOGY;
LHC;
SILICON PIXEL DETECTORS;
TRACKING VERTEX DETECTORS;
VECTOR DETECTORS;
SEMICONDUCTOR DEVICES;
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EID: 15844394801
PISSN: 01689002
EISSN: None
Source Type: Journal
DOI: 10.1016/j.nima.2005.01.067 Document Type: Conference Paper |
Times cited : (13)
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References (31)
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