An electron-multiplying 'Micromegas' grid made in silicon wafer post-processing technology

Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment

Volumn 556, Issue 2, 2006, Pages 490-494

  Chefdeville, M ^a   Colas, P ^b   Giomataris, Y ^b   Van Der Graaf, H ^a   Heijne, E H M ^c   Van Der Putten, S ^a   Salm, C ^d   Schmitz, J ^d   Smits, S ^d   Timmermans, J ^a,e   Visschers, J L ^a  

^a NIKHEF   (Netherlands)

^b CEA SACLAY   (France)

^c CERN   (Switzerland)

^d UNIVERSITY OF TWENTE   (Netherlands)

^e NONE   (Netherlands)

Author keywords

Electron gas multiplication; Integrated grid; Microelectrodes; Micromegas; Microsensors; SU 8; Wafer post processing; Wafer scale integration

Indexed keywords

ANODES; ELECTRONS; MICROELECTRODES; MICROSENSORS; SILICON WAFERS;

ELECTRON GAS MULTIPLICATION; INTEGRATED GRIDS; MICROMEGAS; SU-8; WAFER POST-PROCESSING; WAFER-SCALE INTEGRATION;

ALUMINUM;

EID: 29444445194     PISSN: 01689002     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nima.2005.11.065     Document Type: Article

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