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Volumn 46, Issue 3, 2005, Pages 199-207

Advanced monolithic quantum well infrared photodetector focal plane array integrated with silicon readout integrated circuit

Author keywords

Focal plane array; GaInAs; InP; Monolithic; Quantum well infrared photodetedor; Si substrate

Indexed keywords

INFRARED IMAGING; INTEGRATED CIRCUITS; PASSIVATION; PHOTODETECTORS; SEMICONDUCTING GALLIUM COMPOUNDS; SILICON;

EID: 10444234263     PISSN: 13504495     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.infrared.2004.02.002     Document Type: Article
Times cited : (7)

References (25)
  • 15
    • 10444277490 scopus 로고    scopus 로고
    • Method of anisotropically etching silicon. Robert Bosch GmbH: US Patent 5,501,893
    • F. Laermer, A. schilp, Method of anisotropically etching silicon. Robert Bosch GmbH: US Patent 5,501,893.
    • Laermer, F.1    Schilp, A.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.