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Volumn 17, Issue 9, 2006, Pages 663-683

Electrical studies of semiconductor-dielectric interfaces

Author keywords

[No Author keywords available]

Indexed keywords

CHARACTERIZATION; DIELECTRIC PROPERTIES; GATES (TRANSISTOR); INTERFACES (MATERIALS); PHYSICAL PROPERTIES; SEMICONDUCTING SILICON;

EID: 33749247053     PISSN: 09574522     EISSN: 1573482X     Source Type: Journal    
DOI: 10.1007/s10854-006-0018-z     Document Type: Review
Times cited : (9)

References (79)
  • 1
    • 33749263270 scopus 로고    scopus 로고
    • International Technology Roadmap for Semiconductors Update available at
    • International Technology Roadmap for Semiconductors, 2004 Update available at: http://public.itrs.net
    • (2004)
  • 2
    • 23244467304 scopus 로고    scopus 로고
    • 29 and
    • M.J. Deen, Interface 14 (2), 29 and 58 (2005)
    • (2005) Interface , vol.14 , Issue.2 , pp. 58
    • Deen, M.J.1
  • 18
    • 0002868708 scopus 로고
    • in ed. by R. Kingston (Pennsylvania Press, University of Philadelphia)
    • A. McWhorter, in Semiconductor Surface Physics, ed. by R. Kingston (Pennsylvania Press, University of Philadelphia, 1957), pp. 207-228
    • (1957) Semiconductor Surface Physics , pp. 207-228
    • McWhorter, A.1
  • 29
    • 4344628290 scopus 로고    scopus 로고
    • Low-frequency noise in SiGeC-based pMOSFETs
    • (Danneville, Bonani, Deen, Levinshtein; Eds.)
    • M.J. Deen, O. Marinov, D. Onsongo, S. Dey, S. Banerjee, Low-frequency noise in SiGeC-based pMOSFETs, (Danneville, Bonani, Deen, Levinshtein; Eds.), Proc. SPIE, 5470, 215 (2004)
    • (2004) Proc. SPIE , vol.5470 , pp. 215
    • Deen, M.J.1    Marinov, O.2    Onsongo, D.3    Dey, S.4    Banerjee, S.5
  • 67
    • 33746429130 scopus 로고    scopus 로고
    • in Eds. by R.E. Sah, M.J. Deen, D. Landheer, K.B. Sundaram, W.D. Brown, D. Misra, The 203rd Meeting of the Electrochemical Society Paris, France (27 April-2 May)
    • M.J. Deen, in Proceedings of the Sixth Symposium Silicon Nitride and Silicon Dioxide Thin Insulating Films, Eds. by R.E. Sah, M.J. Deen, D. Landheer, K.B. Sundaram, W.D. Brown, D. Misra, The 203rd Meeting of the Electrochemical Society Paris, France, pp. 3-21 (27 April-2 May 2003)
    • (2003) Proceedings of the Sixth Symposium Silicon Nitride and Silicon Dioxide Thin Insulating Films , pp. 3-21
    • Deen, M.J.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.