메뉴 건너뛰기




Volumn 47, Issue 10, 2000, Pages 1843-1850

Capacitance reconstruction from measured C-V in high leakage, nitride/oxide MOS

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITANCE; CAPACITANCE MEASUREMENT; GATES (TRANSISTOR); MATHEMATICAL MODELS; OPTIMIZATION; TRANSMISSION ELECTRON MICROSCOPY; VOLTAGE MEASUREMENT;

EID: 0034293822     PISSN: 00189383     EISSN: None     Source Type: Journal    
DOI: 10.1109/16.870559     Document Type: Article
Times cited : (49)

References (23)
  • 1
    • 0013067337 scopus 로고    scopus 로고
    • "The end of the road for Moore's law,"
    • 6-11, 1999.
    • E. J. Lerner, "The end of the road for Moore's law," IBM J. Res. Develop., pp. 6-11, 1999.
    • IBM J. Res. Develop., Pp.
    • Lerner, E.J.1
  • 2
    • 0032679052 scopus 로고    scopus 로고
    • "MOS capacitance measurements for high-leakage thin dielectrics,"
    • vol. 46, pp. 1500-1501, July 1999.
    • K. J. Yang and C. Hu, "MOS capacitance measurements for high-leakage thin dielectrics," IEEE Trans. Electron Devices, vol. 46, pp. 1500-1501, July 1999.
    • IEEE Trans. Electron Devices
    • Yang, K.J.1    Hu, C.2
  • 4
    • 0033169532 scopus 로고    scopus 로고
    • "Impact of tunnel currents and channel resistance on the characterization of channel inversion layer charge and polysilicon-gate depletion of sub-20-A gate oxide MOSFET's,"
    • vol. 46, pp. 1650-1655, Aug. 1999.
    • K. Ahmed étal., "Impact of tunnel currents and channel resistance on the characterization of channel inversion layer charge and polysilicon-gate depletion of sub-20-A gate oxide MOSFET's," IEEE Trans. Electron Devices, vol. 46, pp. 1650-1655, Aug. 1999.
    • IEEE Trans. Electron Devices
    • Ahmed, K.1
  • 5
    • 0033870951 scopus 로고    scopus 로고
    • "Limitations of Conductance to the measurement of the interface state density of MOS capacitors with tunneling gate dielectrics,"
    • vol. 47, pp. 601-608, Mar. 2000.
    • E. M. Vogel, W. K. Henson, C. A. Richter, and J. S. Suehle, "Limitations of Conductance to the measurement of the interface state density of MOS capacitors with tunneling gate dielectrics," IEEE Trans. Electron Devices, vol. 47, pp. 601-608, Mar. 2000.
    • IEEE Trans. Electron Devices
    • Vogel, E.M.1    Henson, W.K.2    Richter, C.A.3    Suehle, J.S.4
  • 6
    • 0032680955 scopus 로고    scopus 로고
    • "Estimating oxide thickness of tunnel oxides down to 1.4 nm using conventional capacitance-voltage measurements on MOS capacitors,"
    • vol. 20, pp. 179-181, Apr. 1999.
    • W. K. Henson et al, "Estimating oxide thickness of tunnel oxides down to 1.4 nm using conventional capacitance-voltage measurements on MOS capacitors," IEEE Electron Device Lett., vol. 20, pp. 179-181, Apr. 1999.
    • IEEE Electron Device Lett.
    • Henson, W.K.1
  • 7
    • 0030683249 scopus 로고    scopus 로고
    • "Modeling and characterization of n+ and p+ polysilicon-gated ultra thin oxides
    • (21-26 A)," 1997, pp. 149-150.
    • S. H. Eo et al, "Modeling and characterization of n+ and p+ polysilicon-gated ultra thin oxides (21-26 A)," in Proc. Symp. VLSI Technol., 1997, pp. 149-150.
    • In Proc. Symp. VLSI Technol.
    • Eo, S.H.1
  • 9
    • 0028396643 scopus 로고    scopus 로고
    • "A simple model for quantization effects in heavily-doped silicon MOSFET's at inversion conditions,"
    • vol. 37, p. 411, 1994.
    • M. J. van Dort, P. H. Woerlee, and A. J. Walker, "A simple model for quantization effects in heavily-doped silicon MOSFET's at inversion conditions," Solid-State Electron., vol. 37, p. 411, 1994.
    • Solid-State Electron.
    • Van Dort, M.J.1    Woerlee, P.H.2    Walker, A.J.3
  • 11
    • 0030416118 scopus 로고    scopus 로고
    • "Accurate doping profile determination using TED/QM models extensible to sub-quarter micron nMOSFETs,"
    • 1996, p. 811.
    • P. Vande Voorde et at., "Accurate doping profile determination using TED/QM models extensible to sub-quarter micron nMOSFETs," in IEDM Tech. Dig., 1996, p. 811.
    • In IEDM Tech. Dig.
    • Vande Voorde, P.1
  • 12
    • 84886448116 scopus 로고    scopus 로고
    • "Physical oxide thickness extraction and verification using quantum mechanical simulation,"
    • 1997, pp. 869-872.
    • C. Bowen et al, "Physical oxide thickness extraction and verification using quantum mechanical simulation," in IEDM Tech. Dig., 1997, pp. 869-872.
    • In IEDM Tech. Dig.
    • Bowen, C.1
  • 13
    • 0001385164 scopus 로고    scopus 로고
    • "Mechanism of leakage current through the nano-scale SiO2 layer,"
    • vol. 75, p. 3530, 1994.
    • S. Nagano, M. Tsukiji, E. Hasegawa, and A. Ishitani, "Mechanism of leakage current through the nano-scale SiO2 layer," J. Appl. Phys., vol. 75, p. 3530, 1994.
    • J. Appl. Phys.
    • Nagano, S.1    Tsukiji, M.2    Hasegawa, E.3    Ishitani, A.4
  • 14
    • 33749901423 scopus 로고    scopus 로고
    • "Multi-dimensional quantum effect simulation using a density-gradient model and script-level programming techniques,"
    • 1999, pp. 137-140.
    • C. S. Rafferty et al., "Multi-dimensional quantum effect simulation using a density-gradient model and script-level programming techniques," in Proc. Conf. Simulation Semiconductor Processes and Devices, 1999, pp. 137-140.
    • In Proc. Conf. Simulation Semiconductor Processes and Devices
    • Rafferty, C.S.1
  • 15
    • 0030212001 scopus 로고    scopus 로고
    • "1.5 nm direct-tunneling gate oxide Si MOSFET's,"
    • vol. 43, pp. 1233-1242, Aug. 1996.
    • H. S. Momose et al., "1.5 nm direct-tunneling gate oxide Si MOSFET's," IEEE Trans. Electron Devices, vol. 43, pp. 1233-1242, Aug. 1996.
    • IEEE Trans. Electron Devices
    • Momose, H.S.1
  • 16
    • 33749895164 scopus 로고    scopus 로고
    • "C -V and gate tunneling current characterization of ultra-thin gate oxide MOS (<.,. = 1.3-1.8 nm),"
    • 1999, pp. 151-152.
    • C.-H. Choi etal., "C -V and gate tunneling current characterization of ultra-thin gate oxide MOS (<.,. = 1.3-1.8 nm)," in Proc. Symp. VLSI Technol., 1999, pp. 151-152.
    • In Proc. Symp. VLSI Technol.
    • Choi, C.-H.1
  • 17
    • 0032256946 scopus 로고    scopus 로고
    • "A study of flicker noise in N - AndP- MOSFET's with ultra-thin gate oxide in the direct-tunneling regime,"
    • 1998, pp. 923-926.
    • H.S. Momose et al., "A study of flicker noise in N - andP- MOSFET's with ultra-thin gate oxide in the direct-tunneling regime," in IEDM Tech. Dig., 1998, pp. 923-926.
    • In IEDM Tech. Dig.
    • Momose, H.S.1
  • 18
    • 0032188244 scopus 로고    scopus 로고
    • "Ultrathin nitride/oxide (N/O) gate dielectrics for p+-polysilicon gated PMOSFET's prepared by a combined remote plasma enhanced CVD/thermal oxidation process,"
    • vol. 19, pp. 367-369, Oct. 1998.
    • Y. Wu and G. Eucovsky, "Ultrathin nitride/oxide (N/O) gate dielectrics for p+-polysilicon gated PMOSFET's prepared by a combined remote plasma enhanced CVD/thermal oxidation process," IEEE Electron Device Lett., vol. 19, pp. 367-369, Oct. 1998.
    • IEEE Electron Device Lett.
    • Wu, Y.1    Eucovsky, G.2
  • 19
    • 0033872334 scopus 로고    scopus 로고
    • "1.6 nm oxide equivalent gate dielectrics using nitride/oxide (N/O) composites prepared by RPECVD/oxidation process,"
    • vol. 21, pp. 116-118, Mar. 2000.
    • Y. Wu, Y.-M. Eee, and G. Eucovsky, "1.6 nm oxide equivalent gate dielectrics using nitride/oxide (N/O) composites prepared by RPECVD/oxidation process," IEEE Electron Device Lett., vol. 21, pp. 116-118, Mar. 2000.
    • IEEE Electron Device Lett.
    • Wu, Y.1    Eee, Y.-M.2    Eucovsky, G.3
  • 20
    • 0004146424 scopus 로고    scopus 로고
    • Englewood Cliffs, NJ: Prentice-Hall, 1998.
    • K. Kano, Semiconductor Devices. Englewood Cliffs, NJ: Prentice-Hall, 1998.
    • Semiconductor Devices.
    • Kano, K.1
  • 23
    • 0020180685 scopus 로고    scopus 로고
    • "General optimization and extraction of 1C device model parameters,"
    • vol. 30, pp. 1219-1228, Sept. 1983.
    • K. Doganis and D. E. Scharfetter, "General optimization and extraction of 1C device model parameters," IEEE Trans. Computer-Aided Design, vol. 30, pp. 1219-1228, Sept. 1983.
    • IEEE Trans. Computer-Aided Design
    • Doganis, K.1    Scharfetter, D.E.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.