Our featured division: Dielectric science & technology

Electrochemical Society Interface

Volumn 14, Issue 2, 2005, Pages

  Deen, M Jamal ^a,b  

^a MCMASTER UNIVERSITY   (Canada)

^b ELECTROCHEMICAL SOCIETY   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

EQUIVALENT OXIDE THICKNES (EOT); GATE DIELECTRIC; INTERLEVEL METAL ISOLATION; OXIDE THICKNESS;

CURRENT DENSITY; DIELECTRIC MATERIALS; INFORMATION TECHNOLOGY; SEMICONDUCTING SILICON; SILICA; SWITCHING; THIN FILMS;

CMOS INTEGRATED CIRCUITS;

EID: 23244467304     PISSN: 10648208     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Review

References (0)