Comparison of TOF-ERDA and nuclear resonance reaction techniques for range profile measurements of keV energy implants

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 119, Issue 4, 1996, Pages 533-542

  Jokinen, J ^a   Keinonen, J ^a   Tikkanen, P ^a   Kuronen, A ^a   Ahlgren, T ^a   Nordlund, K ^a  

^a UNIVERSITY OF HELSINKI   (Finland)

Author keywords

[No Author keywords available]

Indexed keywords

CALCULATIONS; MOLECULAR DYNAMICS; SURFACE STRUCTURE; SURFACE TESTING;

NUCLEAR RESONANCE REACTION METHODS; TIME-OF-FLIGHT ELASTIC RECOIL DETECTION ANALYSIS;

ION IMPLANTATION;

EID: 0030421229     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(96)00469-7     Document Type: Review

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