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Proceedings of the International Semiconductor Conference, CAS

Volumn 1, Issue , 2000, Pages 33-42

Advanced thin films for electronics and opto-electronics by atomic layer epitaxy

(1) Niinisto L a

a AALTO UNIVERSITY (Finland)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; EPITAXIAL GROWTH; INTEGRATED CIRCUIT MANUFACTURE; NANOTECHNOLOGY; OPTOELECTRONIC DEVICES; THICKNESS CONTROL;

ATOMIC LAYER EPITAXY (ALE);

THIN FILMS;

EID: 0034452746 PISSN: None EISSN: None Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper

Times cited : (27)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.