ZrO2 film growth by chemical vapor deposition using zirconium tetra-tert-butoxide

Thin Solid Films

Volumn 348, Issue 1, 1999, Pages 90-98

  Cameron, M A ^a   George, S M ^a  

^a UNIVERSITY OF COLORADO   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AUGER ELECTRON SPECTROSCOPY; CHEMICAL VAPOR DEPOSITION; DECOMPOSITION; ELLIPSOMETRY; FILM GROWTH; FOURIER TRANSFORM INFRARED SPECTROSCOPY; MASS SPECTROMETRY; TEMPERATURE; THICKNESS MEASUREMENT;

AUGER DEPTH PROFILE ANALYSIS; GROWTH RATE; REACTIVE STICKING COEFFICIENT; ZIRCONIUM TETRA-TERT-BUTOXIDE;

ZIRCONIUM COMPOUNDS;

EID: 0032656081     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(99)00022-X     Document Type: Article

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