A review of micro-devices assembly techniques and technology

International Journal of Advanced Manufacturing Technology

Volumn 83, Issue 9-12, 2016, Pages 1569-1581

  Cecil, J ^a   Bharathi Raj Kumar, M B ^a   Lu, Yajun ^a   Basallali, Vinod ^a  

^a OKLAHOMA STATE UNIVERSITY   (United States)

Author keywords

Automation; Gripping; Micro assembly; Virtual reality; Work cells

Indexed keywords

AUTOMATION; FACTORY AUTOMATION; MICROMACHINING; MICROMANIPULATORS; MOLECULAR BIOLOGY; SELF ASSEMBLY; VIRTUAL REALITY;

EMERGING DOMAINS; GRIPPING; INDUSTRIAL FIELDS; MANIPULATION TECHNIQUES; MICRO ASSEMBLY; SELF-ASSEMBLY TECHNIQUE; SURVEILLANCE DEVICES; WORK CELL;

SEMICONDUCTOR DEVICES;

EID: 84939443570     PISSN: 02683768     EISSN: 14333015     Source Type: Journal    
DOI: 10.1007/s00170-015-7698-6     Document Type: Article

References (85)

1. Cecil J, Powell D, Vasquez D (2007) Assembly and manipulation of micro devices—a state of the art survey. Robot Comput Integr Manuf 23(5):580–588
2. Salmeron AJ, Tarazon RL et al (2005) Recent development in micro-handling systems for micro-engineering. J Mater Process Technol 167(2–3):499–507
3. Hassani Niaki M et al (2012) Deriving and analyzing the effective parameters in micro grippers performance. Scientica Iranica 19(6):1554–1563
4. Ballandras S, Basrour S, Robert L, Megtert S, Blind P et al (1997) Micro grippers fabricated by the LIGA technique. Sensors Actuators A Phys 58(3):265–272
5. Nashrul M, Shirinzadeh B (2009) Development of a high precision flexure based micro gripper. Precis Eng 33(4):362–370
6. Ivanova K, Ivanov T et al (2006) Thermally driven micro gripper as a tool for micro assembly. Microelectric Eng 83(4–9):1393–1395
7. Enikov ET, Lazarov KV (2001) Optically transparent gripper for microassembly. Proc SPIE Microrobotics Microassembly 4568:40–49
8. Hamedi M, Salimi P, Vismeh M (2012) Simulation and experimental investigation of a novel electrostatic micro gripper system. Mechatronic Eng 98:467–471
9. Yi Y, Liu C (1999) Assembly of micro-optical devices using magnetic actuation. Sensors Actuators A Phys 78(2–3):205–211
10. Wester B, Rajaraman S, Ross J et al (2011) Development and characterization of a packaged mechanically actuated microtweezer system. Sensors Actuators A Phys 167(2):502–511
11. Chen BK, Zhang Y, Sun Y (2009) Active release of microobjects using a MEMS micro gripper to overcome adhesion forces. J Microelectromech Syst 18(3):652–659
12. Khan S, Boer T, Estevez P, Langen HH, Schmidt RH (2010) Development of haptic micro gripper for microassembly operation. Haptics: Generating Perceiving Tangible Sensations Lect Notes Comp Sci 6192:309–314
13. Chesna JW, Smith ST, Hastings DJ, Nowakowski BK, Lin F et al (2012) Development of a micro-scale assembly facility with a three fingered, self-aware assembly tool and electro-chemical etching capabilities. Precis Assem Technol Syst IFIP Adv Inf Commun Technol 371:1–8
14. Porta M, Tichem M (2010) Grasping and interaction force feedback in microassembly. Precis Assem Technol Syst IFIP Adv Inf Commun Technol 315:199–206
15. Kohl M, Just E, Pleging W, Miyazaki S (2000) SMA micro gripper with integrated antagonism. Sensors Actuators A Phys 83(1–3):208–213
16. Kohl M, Krevet B, Just E (2002) SMA micro gripper system. Sensors Actuators A Phys 97–98:646–652
17. Roch I, Bidaud P, Collard D, Buchaillot L (2003) Fabrication and characterization of an SU-8 gripper actuated by a shape memory alloy thin film. J Micromech Microeng 13(2):330–336
18. Kyung JH, Ko BG, Ha YH, Chung GJ (2008) Design of micro gripper for micromanipulation of microcomponents using SMA wires and flexible hinges. Sensors Actuators A Phys 141(1):144–150
19. Lin CM, Fan CH, Lan CC (2009) A shape memory alloy actuated micro gripper with wide handling ranges. IEEE/ASME International Conference on Advanced Intelligent Mechatronics, July14–17, Singapore, ISBN 978-1-4244-2852-6
20. Daly M, Prequent A et al (2012) Fabrication of a novel laser-processed NiTi shape memory micro gripper with enhanced thermomechanical functionality. J Intell Mater Syst Struct 0:1–7
21. Li YF, Ho J, Li N (2000) Development of a physically behaved robot work cell in VR for task teaching. Robot Comput Integr Manuf 16(2–3):91–101
22. Monferrer A, Bonyuet D (2002) Cooperative robot teleoperation through VR interfaces. Proceedings of International Conference on Information Visualization Environments, July 10–12, London, UK, ISBN 0-7695-1656-4
23. Shen Y, Xi N, Lai K, Li W (2004) Internet-based remote assembly of micro-mechanical-systems (MEMS). Assem Autom 24(3):289–296
24. Luo Q, Xiao J (2006). Haptic simulation for micro/nano-scale optical fiber assembly. Proceedings of IEEE International Conference on Intelligent Robots and Systems, October 9–15, Beijing, 1353–1358, ISBN 1-4244-0259-X
25. Reinhart G, Reitar A (2011) An investigation of haptic feedback effects in telepresent microassembly. Prod Eng 5(5):581–586
26. Estevez P, Mulder A, Schmidt RH (2012) 6-DoF miniature maglev positioning stage for application in haptic micro-manipulation. Mechatronics 22(7):1015–1022
27. Bolopion A, Stolle C et al (2012) Vision based haptic feedback for remote micromanipulation in a SEM environment. Int J Optomechanics 6(3):236–252
28. Cecil J, Jones J (2014) An advanced virtual environment for micro assembly. Int J Adv Manuf Technol 72(1):47–56
29. Probst M, Vollmers K, Kratochvil BE, Nelson BJ (2006) “Design of an advanced microassembly system for the automated assembly of bio-microrobots”, Proc. 5th International Workshop on Microfactories
30. Probst M, Hürzeler C, Borer R, Nelson BJ (2009) A microassembly system for the flexible assembly of hybrid robotic MEMS devices. Int J Optomechatronics 3(2):69–90
31. Gopinath N, Cecil J, Powell D (2007) Micro devices assembly using virtual environments. J Intell Manuf 18(3):361–369
32. Alex J, Vikramaditya B, Nelson B (1998) A VR teleoperator interface for assembly of hybrid MEMS prototypes. Proceedings of DETC’98 ASME Design Engineering Technical Conference, September 13–16, Atlanta, GA
33. Popa DO, Stephanou HE (2004) Micro and mesoscale robotic assembly. J Manuf Process 6(1):52–71
34. Cassier C, Ferreira A, Hirai S (2002) Combination of vision servoing techniques and VR-based simulation for semi-autonomous microassembly workstation. Proceedings of the 2002 International Conference on Intelligent Robots and Systems, May 11–15, ISBN 0-7803-7272-7
35. Ferreira A, Hamdi M (2004) Microassembly planning using physically based models in virtual environment. Proceedings of the 2004 International Conference on Intelligent Robots and Systems, September 28–October 2, 4: 3369–3374, ISBN 0-7803-8463-6
36. Cecil J, Gobinath N (2005) Development of a virtual and physical work cell to assemble micro-devices. Robot Comput Integr Manuf 21(4–5):431–441
37. Sun L, Tan F, Rong W, Zhu J (2005) A collision detection approach in virtual environment of micromanipulation robot. High Technol Lett 11(4):371–376
38. Tan FS, Sun LN, Rong BW, Zhu J, Xu L (2004) Modeling of micromanipulation robot in virtual environment. Actametallurgicasinica(English Letters) 17(2):194–198
39. Sulzmann A, Breguet JM, Jacot J (1995) Microvision system (MVS): a 3D computer graphic-based microrobot telemanipulation and position feedback by vision. Proceeding of SPIE on Microrobotics and Mechanical Systems 2593:38–49
40. Liu Z, Chen H (2013) Process simulation of micro device with VR technology. Intell Comput Evol Comput Adv Intell Syst Comput 180:61–65
41. Zhou Q, Aurelian A et al (2001) A microassembly station with controlled environment. Proc SPIE Microrobotics Microassembly 4568:252–260
42. Das AN, Murthy R, Popa DO et al (2012) A multiscale assembly and packaging system for manufacturing of complex micro-nano devices. IEEE Trans Autom Sci Eng 9(1):160–170
43. Mardanov A, Seyfried J, Fatikow S (1999) An automated assembly system for a microassembly station. Comput Ind 38(2):93–102
44. Chang RJ, Lin CY, Lin PS (2011) Visual-based automation of peg-in-hole microassembly process. ASME J Manuf Sci Eng 133(4):1–12
45. Estevez P, Khan S, Lambert P, Porta M, Polat I, Scherer C, Tichem M, Staufer U, Langen HH, Schmidt M (2010) A haptic tele-operated system for microassembly. Precis AssemTechnol Syst IFIP Adv Inf Commun Technol 315:13–20
46. Ruggeri S, Fontana G, Pagano C, Fassi I, Legnani G (2012) Handling and manipulation of microcomponents: work-cell design and preliminary experiments. Precis Assem Technol Syst IFIP Adv Inf Comm Technol 371:65–72
47. Gendreau D, Gauthier M et al (2010) Modular architecture of the microfactories for automatic micro-assembly. Robotics Comp Int Manuf 26(4):354–360
48. Gendreau D, Rakotondrabe M, Lutz P (2012) Towards reconfigurable and modular microfactory based on the TRING-module stick–slip microrobot. 8th International Workshop on Microfactories, Tempere, Finland, June 18–20, Accessed on December 21, 2013, http://hal.archives-ouvertes.fr/hal-00719157
49. Hollis R, Quaid A (1995) An architecture for agile assembly. Proceedings of the American Society of Precision Engineering, Austin, October 15–19, 1995
50. Cecil J, Huber J, Gobinath N, Jacquess J (2011) A virtual factory environment to support process design in micro assembly domains. Comp Aided Design Appl 8(1):119–127
51. Saeedi E, Abbasi S, Böhringer KF, Parviz BA (2007) Molten-alloy driven self-assembly for nano and micro scale system integration. Fluid Dyn Mater Process 2(4):221–246
52. Bogue R (2008) Self-assembly: a review of recent developments. Assembly Automation 28(3):211–215
53. Fonstad CG Jr, Zahn M (2005) Method and system for magnetically assisted statistical assembly of wafers. US Patent 6:888,178
54. Ramadan Q, Uk YS, Vaidyanathan K (2007) Large scale microcomponents assembly using an external magnetic array. Appl Phys Lett 90:172502–172503
55. Rivero R, Shet S, Booty M, Fiory A, Ravindra N (2008) Modeling of magnetic-field-assisted assembly of semiconductor devices. J Electr Mater 37:374–378
56. Shetye S, Eskinazi I, Arnold D (2010) Magnetic self-assembly of millimeter-scale components with angular orientation. J Microelectromechanical Syst 19:599–609
57. Shetye SB, Eskinazi I, Arnold DP (2008) Self-assembly of millimeter-scale components using integrated micromagnets. IEEE Trans Magn 44:4293–4296
58. Grzybowski BA, Stone HA, Whitesides GM (2002) Dynamics of self-assembly of magnetized disks rotating at the liquid-air interface. Proc Natl Acad Sci U S A 99:4147–4151
59. Iwase E, Shimoyama I (2005) Multi-step sequential batch self-assembly of three-dimensional micro-structures using magnetic field. Proceedings of 18th IEEE International Conference on MEMS 2005, Miami, FL, USA, pp. 588–591
60. Wang DA, Ko HH (2009) Magnetic-assisted self-assembly of rectangular-shaped parts. Sens Actuat A: Phys 151:195–202
61. Morris CJ, Isaacson B, Grapes D, Dubey M (2011) Self-assembly of microscale parts through magnetic and capillary interactions. Micromachines 2(1):69–81
62. Scott KL, Hirano T, Yang H, Singh H, Howe RT, Niknejad AM (2004) High-performance inductors using capillary based fluidic self-assembly. J Microelectromechanical Syst 13:300–309
63. Srinivasan U, Liepmann D, Howe RT (2001) Microstructure to substrate self-assembly using capillary forces. J Microelectromechan Syst 10:17–24
64. Srinivasan U, Helmbrecht M, Rembe C, Muller R, Howe R (2002) Fluidic self-assembly of micromirrors onto microactuators using capillary forces. IEEE J Sel Topics Quantum Electr 8:4–11
65. Xiong X, Hanein Y, Fang J, Wang Y, Schwartz DT, Bohringer KF (2003) Controlled multibatch self-assembly of microdevices. J Microlectromechanical Syst 12(2):117–127
66. Clark TD, Ferrigno R, Tien J, Paul KE, Whitesides GM (2002) Template-directed self-assembly of 10-μm-sized hexagonal plates. J Am Chem Soc 124:5419–5426
67. Clark TD, Tien J, Duffy DC, Paul KE, Whitesides GM (2010) Self-assembly of 10-μm-sized objects into ordered three-dimensional arrays. J Am Chem Soc 123:7677–7682
68. Morris CJ, Ho H, Parviz BA (2006) Liquid polymer deposition on free-standing microfabricated parts for self-assembly. J Microelectromechanical Syst 15:1795
69. Zheng W, Jacobs HO (2004) Shape-and-solder-directed self-assembly to package semiconductor device segments. Appl Phys Lett 85:3635–3637
70. Burgard M, Schläfli N, Mai U (2012) Processes for the self-assembly of micro parts. Precision Assem Technol Syst IFIP Adv Inf Comm Technol 371:36–41
71. Tien J, Terfort A, Whitesides GM (1997) Micro-fabrication through electrostatic self-assembly. Langmuir 13(20):5349–5355
72. Harsh KF, Bright VM, Lee YC (1999) Solder self-assembly for three-dimensional microelectromechanical systems. Sensors Actuators 77:237–244
73. Syms RRA (1998) Rotational self-assembly of complex microstructures by the surface tension of glass. Sensors Actuators A 65:238–243
74. Xi J, Schmidt JJ, Montemagno CD (2005) Self-assembled microdevices driven by muscle. Nat Mater 4:180–184
75. Sariola V, Jääskeläinen M, Zhou Q (2010) Hybrid microassembly combining robotics and water droplet self-alignment. IEEE Trans Robot 26(6):965–977
76. Liimatainen V, Zhou Q (2011) Fusion of robotic microassembly and self-assembly. Proceedings of the Microassembly Workshop at IROS 2011, San Francisco, CA.
77. Gobinath N, Cecil J, Son T (2006) A collaborative system to realize virtual enterprises using 3APL, Agent Languages and Technologies IV. Lect Notes Artificial Intell 4327(2006):191–206
78. GENI project (2014). The GENI project, www.geni.net (accessed June 2014).
79. Murthy R, Stephanou HE, Popa DO (2013) AFAM: an articulated four axes microrobot for nanoscale applications. Autom Sci Eng, IEEE Trans 10(2):276–284
80. Cecil J, Gobinath N (2010) A cyber physical test bed for collaborative micro assembly engineering. Proceedings of the 2010 Collaborative Technologies and Systems (CTS) conference, pp. 430–439, Chicago, May 17–21, 2010
81. Ye X, Zhang Y, Ru C, Luo J, Xie S, Sun Y (2013) Automated pick-place of silicon nanowires. AutomSci Eng, IEEE Trans 10(3):554–561
82. Cecil J, Jones J (2014) VREM: an advanced virtual environment for micro assembly. Int J Adv Manuf Technol 72(1–4):47–56
83. Liu J, Gong Z, Tang K, Lu Z, Ru C, Luo J, Sun Y (2014) Locating end-effector tips in robotic micromanipulation. Robotics, IEEE Trans 30(1):125–130
84. Cecil J, Gunda R, Calyam P, Seetharam S (2013) A next generation collaborative framework for advanced manufacturing. In Automation Science and Engineering (CASE), 2013 I.E. International Conference on, pp. 128–132, Madison, Aug. 17–20, 2013
85. US Ignite, https://www.us-ignite.org/