Rotational self-assembly of complex microstructures by the surface tension of glass

Sensors and Actuators, A: Physical

Volumn 65, Issue 2-3, 1998, Pages 238-243

  Syms, R R A ^a  

^a IMPERIAL COLLEGE LONDON   (United Kingdom)

Author keywords

Microstructures; Self assembly; Surface tension

Indexed keywords

BOROPHOSPHATE GLASS; BOROSILICATE GLASS; LITHOGRAPHY; MICROSTRUCTURE; SILICON; SURFACE TENSION;

ROTATIONAL SELF ASSEMBLY;

MICROMACHINING;

EID: 0032520378     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(97)01749-4     Document Type: Article

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