High-performance inductors using capillary based fluidic self-assembly

Journal of Microelectromechanical Systems

Volumn 13, Issue 2, 2004, Pages 300-309

  Scott, Karen L ^a,b   Hirano, Toshiki ^a   Yang, Henry ^a   Singh, Harpreet ^a   Howe, Roger T ^b,c   Niknejad, Ali M ^c  

^a SAN JOSE RESEARCH CENTER   (United States)

^b UNIVERSITY OF CALIFORNIA   (United States)

^c UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

Capillary forces; Chiplets; Microassembly; Microfabricated inductors

Indexed keywords

CAPILLARY FLOW; CMOS INTEGRATED CIRCUITS; ENERGY GAP; FLUIDICS; NATURAL FREQUENCIES; SELF ASSEMBLY; SUBSTRATES;

FLUIDIC MICROASSEMBLY; HIGH PERFORMANCE INDUCTORS; TOROIDAL INDUCTORS;

ELECTRIC INDUCTORS;

EID: 1942532721     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2003.823234     Document Type: Article

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