Fabrication and characterization of an SU-8 gripper actuated by a shape memory alloy thin film

Journal of Micromechanics and Microengineering

Volumn 13, Issue 2, 2003, Pages 330-336

  Roch, I ^a   Bidaud, Ph ^a,b   Collard, D ^a,c   Buchaillot, L ^a  

^a Institut Superieur de l'Electronique et du Numerique   (France)

^b UNIVERSITÉ PIERRE ET MARIE CURIE   (France)

^c INSTITUTE OF INDUSTRIAL SCIENCE   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; FINITE ELEMENT METHOD; MICROELECTRONICS; PHOTORESISTS; RELIABILITY; SHAPE MEMORY EFFECT;

MICROGRIPPERS;

THIN FILMS;

EID: 0037341009     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/13/2/323     Document Type: Article

References (12)

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