Thermally driven microgripper as a tool for micro assembly

Microelectronic Engineering

Volumn 83, Issue 4-9 SPEC. ISS., 2006, Pages 1393-1395

  Ivanova, Katerina ^a   Ivanov, Tzvetan ^a   Badar, Ali ^a   Volland, Burkhard E ^a   Rangelow, Ivo W ^a   Andrijasevic, Daniela ^b   Sümecz, Franz ^b,c   Fischer, Stephanie ^c   Spitzbart, Manfred ^c   Brenner, Werner ^b   Kostic, Ivan ^d  

^a UNIVERSITY OF KASSEL   (Germany)

^b VIENNA UNIVERSITY OF TECHNOLOGY   (Austria)

^c UNIVERSITY OF APPLIED SCIENCES WIENER NEUSTADT   (Austria)

^d INSTITUTE OF CHEMISTRY   (Slovakia)

Author keywords

Microactuator; Microassembly; Microgripper

Indexed keywords

ACTUATORS; ELECTRIC CURRENTS; ELECTRIC POTENTIAL; SCANNING ELECTRON MICROSCOPY; SILICON; SINGLE CRYSTALS;

MICROACTUATOR; MICROASSEMBLY; MICROGRIPPER;

ASSEMBLY;

EID: 33646024011     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2006.01.072     Document Type: Article

References (9)

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