Simulation and experimental investigation of a novel electrostatic microgripper system

Microelectronic Engineering

Volumn 98, Issue , 2012, Pages 467-471

  Hamedi, Mohsen ^a   Salimi, Parisa ^a   Vismeh, Milad ^a  

^a UNIVERSITY OF TEHRAN   (Iran)

Author keywords

Comb drive actuators; Electrostatic actuators; Microassembly; Microgripper

Indexed keywords

ACTUATING VOLTAGE; ACTUATION PRINCIPLES; ANALYTICAL RESULTS; APPLIED VOLTAGES; COMB DRIVE; COMB FINGERS; COMB-DRIVE ACTUATOR; DESIGNED MODELS; EXPERIMENTAL INVESTIGATIONS; KEY PARAMETERS; MICRO ASSEMBLY; MICRO-ASSEMBLY APPLICATIONS; MICRO-COMPONENTS; MICROGRIPPER; MICROGRIPPING SYSTEMS; MULTI-FIELD; OPERATING VOLTAGE; OPTIMUM STIFFNESS; SUSPENSION SYSTEM;

CAPACITORS; ELECTROSTATIC ACTUATORS; ELECTROSTATICS; FINITE ELEMENT METHOD; MATHEMATICAL MODELS; MICROELECTRONICS; MICROOPTICS;

GRIPPERS;

EID: 84865592272     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2012.07.096     Document Type: Conference Paper

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