Optically transparent gripper for microassembly

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4568, Issue , 2001, Pages 40-49

  Enikov, Eniko T ^a   Lazarov, Kalin V ^a  

^a University of Arizona   (United States)

Author keywords

Electrostatic gripper; Microassembly; Optical feedback

Indexed keywords

COMPUTER SIMULATION; ELECTRIC POTENTIAL; LARGE SCALE SYSTEMS; MANIPULATORS; MATHEMATICAL MODELS; MICROELECTROMECHANICAL DEVICES;

ELECTROSTATIC GRIPPERS;

GRIPPERS;

EID: 0035765952     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.444143     Document Type: Conference Paper

References (14)

1. J. Field, "Electrostatic Wafer Clamping for Next-Generation Manufacturing," Solid State Technol. 37, No. 9, 91-98 (1994).
2. K.A. Olson, D. Kotecki, A.J. Ricci, S.E. Lassig, and A. Husain, "Characterization, Modeling, and Design of an Electrostatic Chuck with Improved Wafer Temperature Uniformity," Rev. Sci. Instrum. 66, 1108-1114 (1995).
3. Mamoru Nakasuiji, Hiroyasu Shimizu and Takaaki Kato, "Low voltage and high speed operating electrostatic chuck using sputtered tantalum oxide membrane", J. Vac. Sci. Technol. A vol. 12(5) 1994.
4. Ray Swati, R. Banerjee, N. Basu, A.K. Batabyal, and A.K. Barua, J. Appl. Phys. 54(6), 3497 (1983).
5. Enikov, E.T. and Nelson, B.: Three dimensional microfabrication for multi-degree of freedom capacitive force sensor using fiber chip coupling. Journal of Micromechanics and Microengineering, 10:1-6 2000.
6. Enikov, E. and Boyd, J.: A thermodynamic field theory for anodic bonding of micro electro-mechanical systems (MEMS). International Journal of Engineering Science, 38:135-158, 2000.
7. B.J. Nelson and P.K. Khosla, "Visually Servoed Manipulation Using Active Camera", Proc. Thirthy-Third Annual Allerton Conf. On Communication, Control, and Computing, University of Illinois at Urbana Champaign. Oct. 4-6, 1995.
8. Papanikolopoulos N.; "Selecting features and evaluation of visual measure-ments during robotic visual servoing tasks"; J. Intelligent Robotic Systems, 1995, V13, N3, p.279-304.
9. Nelson B., Papanikolopoulos P., Khosla P.K.; "Visual Servoing for Robotic assembly";Visual Servoing, Ed. Koichi Hashimoto, World Scientific Series in Robotics and Automation,1993, V7,p.139-164.
10. Atkinson, R. "A simple theory of the Johnsen-Rahbek effect"; Brit. Journal of applied physics D, 2(2):325-332, 1969.
11. Enikov, E.T. and Nelson, B.: Electrotransport and deformation model of ion exchange membrane based actuators. In SPIE's 7th Annual Symposium on Smart Structures and Materials, Newport Beach, CA, 2000.
12. Fasse, E.D. and Gosselin C.M.: Spatio-geometric imedance control of Gough-Stewart Platforms; IEEE transactions on Robotics and Automation,15:281-288, 1999.
13. Fasse E.D. and Breedveld P.C.: Modelling of elastically coupled bodies: Part I: General theory and geometric potential function method. ASME J. of Dynamic Systems, Measurement and Control 120:496-500, 1998.
14. Vikramaditya B., Nelson B.J., Yong G., Enikov E.T.:"Microassebly of hybrid magnetic MEMS", to appear in Journal of Micromechatronics, 2(1).