Controlled multibatch self-assembly of microdevices

Journal of Microelectromechanical Systems

Volumn 12, Issue 2, 2003, Pages 117-127

  Xiong, Xiaorong ^a   Hanein, Yael ^a   Fang, Jiandong ^a   Wang, Yanbing ^a   Wang, Weihua ^a   Schwartz, Daniel T ^a   Böhringer, Karl F ^a  

^a University of Washington   (United States)

Author keywords

Capillary force; Electrochemical modulation; Electroplating; Hydrophobicity; Interfacial energy; Micro assembly; Reductive desorption; Self assembled monolayer (SAM); Self assembly; Surface tension

Indexed keywords

ELECTROPLATING; HYDROCARBONS; HYDROPHOBICITY; INTERFACIAL ENERGY; LEAD ALLOYS; LIGHT EMITTING DIODES; MONOLAYERS; SELF ASSEMBLY; SILICON; SURFACE MOUNT TECHNOLOGY; TIN ALLOYS;

CAPILLARY FORCE;

MICROELECTROMECHANICAL DEVICES;

EID: 0037390342     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2003.809964     Document Type: Article

References (40)

1. M. B. Cohn, "Assembly techniques for microelectromechanical systems," Ph.D. dissertation, Univ. California at Berkeley, Dep. Elect. Eng. Comput. Sci., 1997.
2. R. S. Fearing, "Survey of sticking effects for micro-parts." in Proc. IEEE/RSJ Int. Conf. on Robotics and Intelligent Systems (IROS), Pittsburg, PA, 1995, pp. 212-217.
3. S. J. Rails, B. Vikramaditya, and B. J. Nelson, "Micropositioning of a weakly calibrated microassembly system using coarse-to-fine visual servoing strategies," IEEE Trans. Electronics. Packag. Manufact, vol. 23, pp. 123-131, 2000.
4. G. Yang, J. A. Gaines, and B. J. Nelson, "A flexible experimental work-cell for efficient and reliable wafer-level 3D micro-assembly," in Proc. IEEE Int. Conference on Robotics and Automation (ICRA), Seoul, South Korea, 2001, pp. 133-138.
5. J. A. Thompson and R. S. Fearing, "Automating microassembly with ortho-tweezers and force sensing," in Proc. IEEE/RSJ International Conference on Intelligent Robots and Systems (IROS), Maui, HI, 2001, pp. 1327-1334.
6. K. Saitou, D. A. Wang, and S. J. Wou, "Externally resonated linear mi-crovibromotor for microassembly," J. Microelectromech. Syst., vol. 9, pp. 336-346, Sept. 2000.
7. M. B. Cohn, K. F. Böhringer, J. M. Noworolski, A. Singh, C. G. Keller, K. Y. Goldberg, and R. T. Howe, "Microassembly technologies for MEMS," in Proc. SPIE Micromachining and Microfabrication, Santa Clara, CA, 1998, pp. 2-16.
8. A. S. Holmes and S. M. Saidam, "Sacrificial layer process with laser-driven release for batch assembly operations," J. Microelectromech. Syst., vol. 7, no. 4, pp. 416-422, 1998.
9. G. M. Whitesides and B. Grzybowski, "Self-assembly at all scales," Science, vol. 295, pp. 2418-2421, 2002.
10. H. J. Yeh and J. S. Smith, "Fluidic assembly for the integration of GaAs light-emitting diodes on Si substrates,"IEEE Photon. Technol. Lett., vol. 46, pp. 706-709, 1994.
11. K. F. Böhringer, K. Y. Goldberg, M. B. Cohn, R. T. Howe, and A. P. Pisano, "Parallel microassembly using electrostatic force fields," in IEEE Int. Conference on Robotics and Automation (ICRA), Leuven, Belgium, 1998, pp. 483-496.
12. J. Tien, A. Terfort, and G. M. Whitesides, "Microfabrication through electrostatic self-assembly," Langmuir, vol. 13, no. 20, pp. 5349-5355, 1997.
13. A. A. Darhuber, S. M. Troian, and S. Wagner, "Physical mechanisms governing pattern fidelity in microscale offset printing," J. Appl. Phys., vol. 90, no. 7, pp. 3602-3609, 2001.
14. A. A. Darhuber, S. M. Troian, J. M. Davis, S. M. Miller, and S. Wagner, "Selective dip-coating of chemically micropatterned surfaces," J. Appl. Phys., vol. 88, no. 9, pp. 5119-5126, 2000.
15. J. Lee and C. J. Kim, "Surface-tension-driven microactuation based on continuous electrowetting," J. Microelectromech. Syst., vol. 9, no. 2, pp. 171-180, 2000.
16. K. F. Harsh, R. S. Irwin, and Y. C. Lee. "Solder self-assembly for MEMS." in Proc. 1998 Int. Instrumentation Symposium (ISA), Reno, NV, 1998. pp. 256-261.
17. R. R. A. Syms, E. M. Yeatman, V. M. Bright, and G. M. Whitesides, "Surface tension self assembly of microstructures - the state of the art," J. Microelectromech. Syst., to be published.
18. A. Terfort, N. Bowden, and G. M. Whitesides, "Three-dimensional self-assembly of millimeter-scale components," Nature, vol. 386, pp. 162-164, 1997.
19. A. Terfort and G. M. Whitesides, "Self-assembly of an operating electrical circuit based on shape complementarity and the Hydrophobic effect," Adv. Mater., vol. 10, no. 6, pp. 470-473, 1998.
20. D. Gracias, J. Tien, T. L. Breen, C. Hsu, and G. M. Whitesides, "Forming electrical networks in three dimensions by self-assembly," Science, vol. 289, pp. 1170-1172, 2000.
21. U. Srinivasan, R. T. Howe, and D. Liepmann, "Fluidic microassembly using patterned self-assembled monolayers and shape matching," in Proc. 1999 Int. Conf. on Solid-State Sensors and Actuators (Transducers), Japan, 1999, pp. 1170-1173.
22. U. Srinivasan, D. Liepmann, and R. T. Howe, "Microstructure to substrate self-assembly using capillary Forces," J Microelectromech. Syst., vol. 10, no. 1, pp. 17-24, 2001.
23. H. O. Jacobs, A. R. Tao, A. Schwartz, D. H. Gracias, and G. M. Whitesides, "Fabrication of a cylindrical display by patterned assembly," Science, vol. 296, pp. 323-325, 2002.
24. M. N. Yousaf, B. T. Houseman, and M. Mrksich, "Using electroactive substrates to pattern the attachment of two different cell populations," in Proc. National Academy of Sciences of the United States of America (PNAS), vol. 98, 2001, pp. 5992-5996.
25. M. D. Porter, T. B. Bright, D. L. Allara, and C. E. D. Chidsey, "Spontaneously organized molecular assemblies. 4. Structural characterization of n-alkyl thiol monolayers on gold by optical ellipsometry, infrared spectroscopy, and electrochemistry," J. Amer. Chem. Soc., vol. 109, no. 12, pp. 3359-3568, 1987.
26. N. L. Abbot, A. B. German, and G. M. Whitesides, "Active control of wetting using applied electrical potentials and self-assembled monolayers," Langmuir, vol. 11, no. 1, pp. 16-18, 1995.
27. M. M. Walczak, D. D. Popenoe, R. S. Deinhammer, B. D. Lamp, C. Chung, and M. D. Porter, "Reductive desorption of alkanethiolate monolayers at gold: a measure of surface coverage," Langmuir, vol. 7, no. 11, pp. 2687-2693, 1991.
28. U. Srinivasan, "Fluidic self-assembly of mmicrofabricated parts to substrates using capillary forces," Ph.D. dissertation, Univ. California at Berkeley, Dep. Chem. Eng., 2001.
29. C. D. Bain, E. B. Troughton, Y. T. Tao, J. Evall, G. M. Whitesides, and R. G. Nuzzo, "Formation of monolayer films by the spontaneous assembly of organic thiols from solution onto gold," J. Amer. Chem. Soc., vol. 111, pp. 321-335, 1989.
30. S. Chen, L. Li, C. L. Boozer, and S. Jiang, "Controlled chemical and structural properties of mixed self-assembled monolayers of alkanethiols on Au(111)," Langmuir, vol. 16, no. 24, pp. 9287-9293, 2000.
31. A. J. Bard and L. R. Faulkner, Electrochemical Methods: Fundamentals and Applications, 1st ed. New York: Wiley, 1980.
32. J. A. Pojman, W. W West, and J. Simmons, "Propagating fronts of polymerization in the physical chemistry laboratory," J. Chem. Educ., vol. 74, no. 6, pp. 727-730, 1997.
33. K. F. Böhringer, U. Srinivasan, and R. T. Howe, "Modeling of capillary forces and binding sites for fluidic self-assembly," in Proc. IEEE Workshop on Micro Electro Mechanical Systems (MEMS), Switzerland, 2001, pp. 369-374.
34. X. Xiong, Y. Hanein, W. Wang, D. T. Schwartz, and K. F. Böhringer, "Multi-batch micro-selfassembly via controlled capillary forces," in Proc. IEEE/RSJ Int. Conference on Intelligent Robots and Systems (IROS), Maui, HI, 2001, pp. 1335-1342.
35. A. Greiner, J. Lienemann, J. G. Korvink, X. Xiong, Y. Hanein, and K. F. Böhringer, "Capillary forces in micro-fluidic self-assembly," in Fifth Int. Conference on Modeling and Simulation of Microsystems (MSM'02), San Juan, Puerto Rico, Apr. 22-25, 2002.
36. K. Brakke, Surface Evolver. Selinsgrove, PA: Mathematics Department, Susquehanna University, 1999, pp. 1870-1001.
37. C. J. Zhong and M. D. Porter, "Fine structure in the voltammetric desorption curves of alkanethiolate monolayers chemisorbed at gold," J. Electroanal. Chem., vol. 425, pp. 147-153, 1997.
38. J. W. Dini, Electrodeposition: the Materials Science of Coatings and Substrates, NJ: Noyes, 1993.
39. A. A. Darhuber, S. M. Troian, S. M. Miller, and S. Wagner, "Morphology of liquid microstructures on chemically patterned surfaces," J. Appl. Phys., vol. 87, no. 11, pp. 7768-7775, 2000.
40. W. S. N. Trimmer, "Microrobots and micromechanical systems," Sens. Actuators, vol. 19, no. 3, pp. 267-287, 1989.