메뉴 건너뛰기




Volumn 23, Issue 5, 2007, Pages 580-588

Assembly and manipulation of micro devices-A state of the art survey

Author keywords

Micro assembly; Micro grippers; Micron sized parts; Robots

Indexed keywords

AUTOMATION; COMPUTER AIDED MANUFACTURING; GRIPPERS; INFORMATION TECHNOLOGY;

EID: 34247563292     PISSN: 07365845     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.rcim.2006.05.010     Document Type: Article
Times cited : (97)

References (50)
  • 1
    • 34247640229 scopus 로고    scopus 로고
    • Bohringer K, Fearing K, Goldberg K. A chapter on micro assembly. The Handbook of Industrial Robotics. 2nd ed.; 1998, 〈http://www.ee.washington.edu/research/mems/publications/1999/chapters/industrialrobotics-bohringer-99.pdf〉; [retrieved 7.02.2003].
  • 2
    • 0036059546 scopus 로고    scopus 로고
    • Greminger M, Yang G, Nelson B. Sensing nanonewton level forces by visually tracking structural deformations. In: Proceedings of the 2002 IEEE international conference on robotics and automation; 2002, 〈http://www.menet.umn.edu/~grem/papers/icra2002.pdf〉; [retrieved 14.06.03].
  • 3
    • 0037335455 scopus 로고    scopus 로고
    • On forces in microelectromechanical systems
    • Zhou S.-A. On forces in microelectromechanical systems. Int J Eng Sci 41 (2003) 313-335
    • (2003) Int J Eng Sci , vol.41 , pp. 313-335
    • Zhou, S.-A.1
  • 5
    • 0001497453 scopus 로고    scopus 로고
    • Theoretical review of particle adhesion
    • Mittal I.K.L. (Ed)
    • Bowling R.A. Theoretical review of particle adhesion. In: Mittal I.K.L. (Ed). Particles on surfaces (1999) 129-142
    • (1999) Particles on surfaces , pp. 129-142
    • Bowling, R.A.1
  • 6
    • 0031104214 scopus 로고    scopus 로고
    • A polar, polar, and electrostatic interactions of spherical particles in cylindrical pores
    • Bhattacharjee S., and Ashutosh S. A polar, polar, and electrostatic interactions of spherical particles in cylindrical pores. J Coll Interface Sci 187 (1997) 83-95
    • (1997) J Coll Interface Sci , vol.187 , pp. 83-95
    • Bhattacharjee, S.1    Ashutosh, S.2
  • 7
    • 0033199444 scopus 로고    scopus 로고
    • The van der Waals interaction between a spherical particle and a cylinder
    • Gu Y., and Dongqing L. The van der Waals interaction between a spherical particle and a cylinder. J Coll Interface Sci 217 (1999) 60-69
    • (1999) J Coll Interface Sci , vol.217 , pp. 60-69
    • Gu, Y.1    Dongqing, L.2
  • 8
    • 0034662205 scopus 로고    scopus 로고
    • Analytical dispersion force calculations for nontraditional geometries
    • Montgomery S.W., Franchek M.A., and Goldschmidt V.W. Analytical dispersion force calculations for nontraditional geometries. J Coll Interface Sci 227 (2000) 567-584
    • (2000) J Coll Interface Sci , vol.227 , pp. 567-584
    • Montgomery, S.W.1    Franchek, M.A.2    Goldschmidt, V.W.3
  • 9
    • 0015893469 scopus 로고
    • Surface forces in the deposition of small particles
    • Kitchener J.A. Surface forces in the deposition of small particles. J Soc Cosmetic Chem 24 (1973) 709-725
    • (1973) J Soc Cosmetic Chem , vol.24 , pp. 709-725
    • Kitchener, J.A.1
  • 11
    • 34247626560 scopus 로고    scopus 로고
    • Will P, Coutinho M. Open loop dynamic control of parts moving on an intelligent motion surface along paths composed of a sequence of straight line segments. USC Information Sciences Institute; 1997, 〈http://citeseer.nj.nec.com/coutinho97open.html〉; [retrieved 26.06.03]
  • 12
    • 0037341009 scopus 로고    scopus 로고
    • Fabrication and characterization of an SU-8 gripper Actuated by a shape memory alloy thin film
    • Roch I., Buchaillot L., Collard D., and Bidaud Ph. Fabrication and characterization of an SU-8 gripper Actuated by a shape memory alloy thin film. J Micromech Microeng 13 (2003) 330-336
    • (2003) J Micromech Microeng , vol.13 , pp. 330-336
    • Roch, I.1    Buchaillot, L.2    Collard, D.3    Bidaud, Ph.4
  • 13
    • 34247623803 scopus 로고    scopus 로고
    • Petrovic, D, Chatzitheodoridis E, Popovic G, Del Medico O, Almansz A, Brenner W, Detter H, Martins R, Fortunato E. Design of a mechanical gripper for assembly of micro parts. In: Proceedings of XXX convegno nazionale AIAS-Alghero (SS), 12-15 September 2001. p. 1369-73.
  • 14
    • 85004456955 scopus 로고
    • Test of nontweezing micro handling tools with releasing mechanism/prototypes of mirco nontweezing handling tools with releasing mechanism
    • Nakao M., Kazuhisa I., Tomomasa S., and Yotaro H. Test of nontweezing micro handling tools with releasing mechanism/prototypes of mirco nontweezing handling tools with releasing mechanism. Jpn Mach Acad Soc J C 61 583 (1995) 1021-1026
    • (1995) Jpn Mach Acad Soc J C , vol.61 , Issue.583 , pp. 1021-1026
    • Nakao, M.1    Kazuhisa, I.2    Tomomasa, S.3    Yotaro, H.4
  • 15
    • 34247633251 scopus 로고    scopus 로고
    • Keoschkerjan R, Wurmus H. A novel microgripper with parrallel movement of gripping arms. In: Actuator 2002, eighth international conference on new actuators, Bremen, Germany, 10-12 June 2002. p. 321-4.
  • 16
    • 0032668554 scopus 로고    scopus 로고
    • Kasaya T, Miyazaki H, Saito S, Sato T. Micro object handling under SEM by vision-based automatic control. Proceedings of the 2002 IEEE international conference on robotics and automation; 1999. p. 2189-96.
  • 17
    • 34247572121 scopus 로고    scopus 로고
    • Keller C. Microgrippers with integrated actuator and force sensors. In: Proceedings of the world automation congress, anchorage; 1998. p. 217-22.
  • 18
    • 0033706362 scopus 로고    scopus 로고
    • Zhou Y, Nelson BJ. The effect of material properties and gripping force on micrograsping. In: Proceedings of the 2000 IEEE national conference on robotics and automation; 2002. p. 1115-20.
  • 20
    • 0036056248 scopus 로고    scopus 로고
    • Fung CKM, Elhajj I, Li JW, Xi, N. A 2D PVDF force sensing system for micro-manipulation and micro-assembly. In: Proceedings of the 2002 IEEE international conference on robotics and automation; 2002. p. 1489-94.
  • 21
    • 34247575431 scopus 로고    scopus 로고
    • Cecil J. Review of micro assembly systems and techniques. Project report, Virtual Enterprise Engineering LABORATORY (VEEL), Industrial Engineering Department, New Mexico State University, 2003.
  • 22
    • 34247632351 scopus 로고    scopus 로고
    • Cecil J, et al. Assembly of Micro devices. In: Proceedings of the 2004 annual industrial engineering research conference, Houston, TX, 15-17 May 2004.
  • 23
    • 0031640401 scopus 로고    scopus 로고
    • Feddema JT, Simon, RW. CAD-driven microassembly and visual servoing. In: Proceedings of the IEEE international conference on robotics and automation, Leuven, Belgium; 1998. p. 1212-19.
  • 24
    • 34247605190 scopus 로고    scopus 로고
    • Hollis R, Gowdy J. Miniature factories for precision assembly. In: Proceedings of the international workshop on micro-factories, Tsukuba; 1998. p. 1-6.
  • 26
    • 34247560925 scopus 로고    scopus 로고
    • Kim K, Kim D, Lee S, Lee J. Hybrid microassembly for three-dimensional MEMS components. Korea institute of Science and Technology; 2001, 〈http://robot.kist.re.kr/papers/2002/〉; [retrieved 6.03.03].
  • 27
    • 0036061333 scopus 로고    scopus 로고
    • Popa D, Kang B, Sin J, Zou J. Reconfigurable micro-assembly system for photonics applications. In: Proceedings of the 2002 IEEE international conference on robotics and automation, Washington DC; 2002. p. 1495-500.
  • 28
    • 34247563592 scopus 로고    scopus 로고
    • Thompson J, Fearing R. Automating Microassembly with ortho-tweezers and force sensing. Department of EE and CS, University of Califarnia, Berkley; 2001, 〈http://robotics.eecs.berkeley.edu/~ronf/PAPERS/jat01.pdf〉; [retrieved 7.08.03]
  • 29
    • 0034830194 scopus 로고    scopus 로고
    • Vikramaditya B, Nelson BJ. Modeling microassembly tasks with interactive forces. In: Proceedings of the fourth IEEE international symposium on assembly and task planning, Fukuoka, Japan, 28-29 May 2001. p. 482-9.
  • 30
    • 34247592134 scopus 로고    scopus 로고
    • Xiong X, Hanein Y, Fang J, Wang Y, Wang W, Schwartz D, Bohringer F. Controlled multibatch self-assembly of microdevices. In: Proceedings of the 2003 IEEE international conference on robotics and automation; 2003, 〈http://www.ee.washington.edu/research/mems/publications/2003/journals/ieee-mems-xiong-03.pdf〉; [retrieved 3.05.03]
  • 31
    • 34247558285 scopus 로고    scopus 로고
    • Zhang H, Burdet E, Hutmacher D, Poo A, Bellouard Y, Clavel R, Sidler T. Robotic micro-assembly of scaffold/cell constructs with a shape memory alloy gripper. In: Proceedings of the 2002 IEEE international conference on robotics and automation, San Francisco, CA; 2002. p. 1115-9, 〈http://guppy.mpe.nus.edu.sg/~hzhang/docs/ICRA02.pdf〉; [retrieved 16.06.03]
  • 32
    • 34247595115 scopus 로고    scopus 로고
    • Kim, D-H, Kim K, Hong J. Implementation of a self-sensing MEMS cantilever for nanomanipulation. In: Proceedings of the fourth Korean MEMS conference, Kyeongjn, Korea, 12-13 April 2002.
  • 33
    • 17944382877 scopus 로고    scopus 로고
    • An optically transparent gripper FOR micro-assembly
    • Enikov E., and Lazarov K.V. An optically transparent gripper FOR micro-assembly. J Micromechatron 2 2 (2004) 121-140
    • (2004) J Micromechatron , vol.2 , Issue.2 , pp. 121-140
    • Enikov, E.1    Lazarov, K.V.2
  • 34
    • 17944383403 scopus 로고    scopus 로고
    • Cecil J, Gobinath N. Development of a virtual and physical cell to assemble micro devices. J Robot & CIM, Aug-Oct 2005, pp. 431-441 [in print].
  • 35
    • 84943406169 scopus 로고    scopus 로고
    • Wang X, Vincent L, Yu M, Huang Y, Liu C. Architecture of a three-probe MEMS nanomanipulator with nanoscale end-effectors. In: Proceedings of the 2003 IEEE/ASME international conference on advanced mechatronics. AIM 2003. p. 891-6.
  • 36
    • 34247591614 scopus 로고    scopus 로고
    • Monferrer A, Bonyuet D. Cooperative robot teleoperation through virtual reality interfaces. Univesitat Politecnia de Catalunya, Delta Research Labs; 2000, 〈http://vw.indiana.edu/cive02/036_monferrer_CoopRobot.pdf〉; [retrieved 25.07.03].
  • 37
    • 0036060549 scopus 로고    scopus 로고
    • Cassier C, Ferreira A, Hirai S. Combination of vision servoing techniques and VR-based simulation for semi-autonomous microassembly workstation. In: Proceedings of the 2002 IEEE international conference on robotics and automation; 2002. p. 1501-6.
  • 38
    • 84455179309 scopus 로고    scopus 로고
    • Alex J, Vikramaditya B, Nelson BJ. A virtual realityteleoperator interface for assembly of hybrid MEMS prototypes. In: Proceedings of DETC'98 1998 ASME engineering technical conference, Atlanta, GA, 13-16 September 1998.
  • 39
    • 0029517581 scopus 로고    scopus 로고
    • Sulzmann A, Breguet JM, Jacot J. Microvision system (MVS): a 3D computer graphic-based microrobot telemanipulation and position feedback by vision. In: Proceedings of SPIE on microrobotics and mechanical systems, vol. 2593, Philadelphia, PA, USA, 25 October 1995.
  • 40
    • 34247570147 scopus 로고    scopus 로고
    • Ralis R, Vkramaditya B, Nelson B. Visual servoing frameworks for microassembly of hybrid MEMS. University of Illinois at Chicago, University of Minnesota; 1998, 〈http://www.me.umn.edu/divisions/design/adv_microsystems/publications/spie98.pdf〉; [retrieved 23.06.03].
  • 41
    • 34247583062 scopus 로고    scopus 로고
    • Allen P, Yoshimi B, Timcenko A. Real-time visual servoing. Department of Computer Science, Columbia University; 1991, 〈http://citeseer.nj.nec.com/allen91realtime.html〉; [retrieved 12.06.2003].
  • 42
    • 34247581019 scopus 로고    scopus 로고
    • Lee S, Kim K, Kim D, Park J, Park G. Recognizing and tracking of 3D microparts using multiple visions for micromanipulation. Department of Electrcal Engineering, Korea University; 2001, 〈http://robot.kist.re.kr/papers/Paper79.PDF〉; [retrieved 22.06.03].
  • 43
    • 34247634287 scopus 로고    scopus 로고
    • Nelson B, Papanikolopoulos N, Khosla P. Visual servoing for robotic assembly. The robotics Institute, Carnegie Melon University; 2000, 〈http://citeseer.nj.nec.com/nelson93visual.html〉; [retrieved 23.06.03].
  • 44
    • 34247572638 scopus 로고    scopus 로고
    • Hutchinson S, Hager G, Corke P. A tutorial on visual servo control. University of Illinois at Chicago; 1996, 〈http://citeseer.nj.nec.com/hutchinson96tutorial.html〉; [retreived 15.06.03].
  • 45
    • 85196504079 scopus 로고    scopus 로고
    • Wang X, Ostrowski JP, Anathasuresh GK. Mechanical characterization and controlled manipulation using vision-based techniques and compliant devices. In: Proceedings of 2001 ASME international mechanical engineeing congress and exposition, New York, NY, 11-16 November 2001.
  • 46
    • 34247607430 scopus 로고    scopus 로고
    • Clark JV, Zhou N, Bindel D, Schento L, Wu W, Demmel J, Pister KSJ. 3D MEMS simulation using modified nodal analysis, 30 September 2003. Available: 〈http://www-bsac.eecs.berkeley.edu/cadtools/sugar/Paper/sem2000.pdf〉.
  • 47
    • 34247567294 scopus 로고    scopus 로고
    • Clark JV, Bindel D, Kao W, Zhu E, Kuo A, Zhou N, Nie J, Demmel J, Bai Z, Govindjee S, Pister KSJ, Gu M, Agogino A. Addressing the needs of complex MEMS design, 30 September 2003. Available: 〈http://www-bsac.eecs.berkeley.edu/~jvclark/MEMS_2002_Paper.pdf〉.
  • 48
    • 3142681765 scopus 로고    scopus 로고
    • Jing Q, Mukherjee T, Fedder GK. Large-deflection model for schematic-based behavioral simulation in NODAS. In: Technical proceedings of the 2002 international conference on modeling and simulation of microsystems nanotech 2002 - MSM, San Juan, Puerto Rico, 22-25 April 2002. p. 136-39.
  • 49
    • 34247566781 scopus 로고    scopus 로고
    • Kamalian R, Zhou N, Agogino AM. A comparison of MEMS synthesis techniques, 16 December 2003. Available: 〈best.me.berkeley.edu/~aagogino/papers/02-0202-1-kamalian_mems.pdf〉.
  • 50
    • 0030233744 scopus 로고    scopus 로고
    • Micro electro mechanical systems
    • MacDonald N.C. Micro electro mechanical systems. Microelectron Eng 32 (1996) 49-73
    • (1996) Microelectron Eng , vol.32 , pp. 49-73
    • MacDonald, N.C.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.