Liquid polymer deposition on free-standing microfabricated parts for self-assembly

Journal of Microelectromechanical Systems

Volumn 15, Issue 6, 2006, Pages 1795-1804

  Morris, Christopher J ^a   Ho, Harvey ^a   Parviz, Babak A ^a  

^a University of Washington   (United States)

Author keywords

Interface phenomena; Microfabrication process; Polymer deposition; Self assembly; Surface tension

Indexed keywords

DEPOSITION; INTERFACES (MATERIALS); MICROMETERS; MONOLAYERS; SELF ASSEMBLY; SURFACE TENSION; THIN FILMS;

CROSS-LINKABLE POLYMER; LIQUID POLYMER DEPOSITION; MICROMETER-SCALE SILICON PARTS;

POLYMERS;

EID: 33744466815     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2006.883584     Document Type: Article

References (44)

1. R. R. A. Syms, E. M. Yeatman, V. M. Bright, and G. M. Whitesides, "Surface tension-powered self-assembly of microstructures - The state of the art," J. Microelectromech. Syst., vol. 12, no. 4, pp. 387-417, Aug. 2003.
2. H.-J. J. Yeh and J. S. Smith, "Fluidic self-assembly for the integration of GaAs light-emitting diodes on Si substrates," IEEE Photon. Technol. Lett., vol. 6, no. 6, pp. 706-708, Jun. 1994.
3. S. Stauth and B. A. Parviz, "Self-assembled silicon networks on plastic," in Proc. 13th Int. Conf. Solid State Sens., Actuators, Microsyst. (Transducers), Seoul, Korea, 2005, pp. 964-967.
4. H. O. Jacobs, A. R. Tao, A. Schwartz, D. H. Gracias, and G. M. Whitesides, "Fabrication of a cylindrical display by patterned assembly," Science, vol. 296, no. 5566, pp. 323-5, 2002.
5. D. H. Gracias, J. Tien, T. L. Breen, C. Hsu, and G. M. Whitesides, "Forming electrical networks in three dimensions by self-assembly," Science, vol. 289, no. 5482, pp. 1170-1172, 2000.
6. C. J. Morris, S. A. Stauth, and B. A. Parviz, "Self-assembly for micro and nano scale packaging: Steps toward self-packaging," IEEE Trans. Adv. Packag., vol. 28, no. 4, pp. 600-611, Nov. 2005.
7. L. Zhou, J. M. Kahn, and K. S. J. Pister, "Corner-cube retroreflectors based on structure-assisted assembly for free-space optical communication," J. Microelectromech. Syst., vol. 12, no. 3, pp. 233-242, Jun. 2003.
8. H. Sirringhaus, T. Kawase, R. H. Friend, T. Shimoda, M. Inbasekaran, W. Wu, and E. P. Woo, "High-resolution inkjet printing of all-polymer transistor circuits," Science, vol. 290, no. 5499, pp. 2123-2126, 2000.
9. J. Wang, P. Shustack, and S. Garner, "High performance polymer waveguide devices via low cost direct photolithography process," Proc. SPIE-Int. Soc. Opt. Eng., vol. 4904, pp. 129-138, 2002.
10. F. Garnier, R. Hajlaoui, A. Yassar, and P. Srivastava, "All-polymer field-effect transistor realized by printing techniques," Science, vol. 265, no. 5179, pp. 1684-1686, 1994.
11. L. R. Bao, L. Tan, X. D. Huang, Y. P. Kong, L. J. Guo, S. W. Pang, and A. F. Yee, "Polymer inking as a micro- and nanopatterning technique," J. Vac. Sci. Technol. B, Microelectron. Process. Phenom., vol. 21, no. 6, pp. 2749-2754, 2003.
12. S. F. Kistler and P. M. Schweizer, Liquid Film Coating. London, U.K.: Chapman & Hall, 1997.
13. A. A. Darhuber, S. M. Trojan, J. M. Davis, S. M. Miller, and S. Wagner, "Selective dip-coating of chemically micropatterned surfaces," J. Appl. Phys., vol. 88, no. 9, pp. 5119-5126, 2000.
14. L.-T. Lee, C. A. P. Leite, and F. Galembeck, "Controlled nanoparticle assembly by dewetting of charged polymer solutions," Langmuir, vol. 20, no. 11, pp. 4430-4435, 2004.
15. J. Z. Wang, Z. H. Zheng, H. W. Li, W. T. S. Huck, and H. Sirringhaus, "Dewetting of conducting polymer inkjet droplets on patterned surfaces," Nature Materials, vol. 3, no. 3, pp. 171-176, 2004.
16. U. Srinivasan, D. Liepmann, and R. T. Howe, "Microstructure to substrate self-assembly using capillary forces," J. Microelectromech. Syst., vol. 10, no. 1, pp. 17-24, Feb. 2001.
17. X. Xiong, Y. Hanein, J. Fang, Y. Wang, W. Wang, D. T. Schwartz, and K. F. Böhringer, "Controlled multibatch self-assembly of microdevices," J. Microelectromech. Syst., vol. 12, no. 2, pp. 117-127, Apr. 2003.
18. A. Terfort and G. M. Whitesides, "Self-assembly of an operating electrical circuit based on shape complementarity and the hydrophobic effect," Adv. Mater., vol. 10, no. 6, pp. 470-473, 1998.
19. J. Tien, T. L. Breen, and G. M. Whitesides, "Crystallization of millimeter-scale objects with use of capillary forces," J. Amer. Chem. Soc., vol. 120, no. 48, pp. 12670-12671, 1998.
20. T. D. Clark, J. Tien, D. C. Duffy, K. E. Paul, and G. M. Whitesides, "Self-assembly of 10 μm-sized objects into ordered three-dimensional arrays," J. Amer. Chem. Soc., vol. 123, no. 31, pp. 7677-7682, 2001.
21. T. D. Clark, R. Ferrigno, J. Tien, K. E. Paul, and G. M. Whitesides, "Template-directed self-assembly of 10 μm-sized hexagonal plates," J. Amer. Chem. Soc., vol. 124, no. 19, pp. 5419-5426, 2002.
22. C. J. Morris, H. Ho, and B. A. Parviz, "Bridging between nano- and micro-scales for system integration: Controlled capillary force-driven self assembly," in Proc. 5th IEEE Conf. Nanotechnol., Nagoya, Japan, 2005, pp. 508-511, WE-A1-2.
23. C. J. Morris, H. Ho, and B. A. Parviz, "Using insolubility wave-front for polymer deposition on self-assembling microfabricated parts," in Proc. Int. Conf. MEMS, NANO, Smart Syst., Banff, AB, Canada, 2005, pp. 223-227.
24. A. Terfort, N. Bowden, and G. M. Whitesides, "Three-dimensional self-assembly of millimetre-scale components," Nature, vol. 386, no. 6621, pp. 162-164, 1997.
25. A. Ulman, "Formation and structure of self-assembled monolayers," Chem. Rev., vol. 96, no. 4, pp. 1533-1554, 1996.
26. P. E. Laibinis, J. J. Hickman, M. S. Wrighton, and G. M. Whitesides, "Orthogonal self-assembled monolayers: Alkanethiols on gold and alkane carboxylic acids on alumina," Science, vol. 245, no. 4920, pp. 845-848, 1989.
27. J. J. Hickman, P. E. Laibinis, D. I. Auerbach, C. Zou, T. J. Gardner, G. M. Whitesides, and M. S. Wrighton, "Toward orthogonal self-assembly of redox active molecules on platinum and gold: Selective reaction of disulfide with gold and isocyanide with platinum," Langmuir, vol. 8, no. 2, pp. 357-359, 1992.
28. B. R. Martin, D. J. Dermody, B. D. Reiss, M. Fang, L. A. Lyon, M. J. Natan, and T. E. Mallouk, "Orthogonal self-assembly on colloidal gold-platinum nanorods," Adv. Mater., vol. 11, no. 12, pp. 1021-1025, 1999.
29. M. Hsiao, S. Lichter, and L. G. Quintero, "The critical weber number for vortex and jet formation for drops impinging on a liquid pool," Phys. Fluids, vol. 31, no. 12, pp. 3560-3562, 1988.
30. D. S. Chapman and P. R. Critchlow, "Formation of a vortex ring falling drops, J. Fluid Mech., vol. 29, pp. 177-185, 1967.
31. F. M. White, Viscous Fluid Flow, 2nd ed. New York: McGraw-Hill, 1991.
32. L. E. Scriven and C. V. Sternling, "The Marangoni effects," Nature, vol. 187, pp. 186-188, 1960.
33. C. J. Morris and B. Parviz, "Self-assembly and characterization of Marangoni microfluidic actuators," J. Micromech. Microeng., 2006, submitted for publication.
34. P. C. Chatwin, "The dispersion of contaminant released from instantaneous sources in laminar flow near stagnation points," J. Fluid Mech., vol. 66, no. 4, pp. 753-766, 1974.
35. P. Dimitrakopoulos and J. J. L. Higdon, "On the displacement of three-dimensional fluid droplets from solid surfaces in low-Reynolds-number shear flows," J. Fluid Mech., vol. 377, pp. 189-222, 1998.
36. C. D. Bain, E. B. Troughton, Y. T. Tao, J. Evall, G. M. Whitesides, and R. G. Nuzzo, "Formation of monolayer films by the spontaneous assembly of organic thiols from solution onto gold," J. Amer. Chem. Soc., vol. 111, no. 1, pp. 321-335, 1989.
37. A. Ermolieff, S. Marthon, F. Bertin, F. Pierre, J. F. Daviet, and L. Peccoud, "X-ray photoelectron spectroscopy studies of contamination and cleaning of surfaces exposed to a fluorocarbon plasma," J. Vac. Sci. Technol. A, Vac. Surf. Films, vol. A9, no. 6, pp. 2900-2906, 1991.
38. H. O. Finklea, L. R. Robinson, A. Blackburn, B. Richter, D. Allara, and T. Bright, "Formation of an organized monolayer by solution adsorption of octadecyltrichlorosilane on gold: Electrochemical properties and structural characterization," Langmuir, vol. 2, no. 2, pp. 239-244, 1986.
39. U. Srinivasan, M. R. Houston, R. T. Howe, and R. Maboudian, "Alkyltrichlorosilane-based self-assembled monolayer films for stiction reduction in silicon micromachines," J. Microelectromech. Syst., vol. 7, no. 2, pp. 252-260, Apr. 1998.
40. V. DePalma and N. Tillman, "Friction and wear of self-assembled trichlorosilane monolayer films on silicon," Langmuir, vol. 5, no. 3, pp. 868-72, 1989.
41. M. Boncheva, D. H. Gracias, H. O. Jacobs, and G. M. Whitesides, "Biomimetic self-assembly of a functional asymmetrical electronic device," Proc. Nat. Acad. Sci. USA, vol. 99, no. 8, pp. 4937-40, 2002.
42. W. Zheng, P. Buhlmann, and H. O. Jacobs, "Sequential shape-and-solder-directed self-assembly of functional microsystems," Proc. Nat. Acad. Sci. USA, vol. 101, no. 35, pp. 12814-12817, 2004.
43. J. W. S. Rayleigh, "On the instability of jets," Proc. London Math. Soc., vol. 10, pp. 4-13, 1878.
44. D. J. Srolovitz and S. A. Safran, "Capillary instabilities in thin films I. Energetics," J. Appl. Phys., vol. 60, no. 1, pp. 247-254, 1986.