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Volumn 26, Issue 6, 2010, Pages 965-977

Hybrid microassembly combining robotics and water droplet self-alignment

Author keywords

Droplet self alignment; hybrid microassembly; micro nanorobots; microassembly; self assembly

Indexed keywords

DIFFERENT SIZES; FINAL ASSEMBLY; HANDLING ROBOTS; HYBRID ASSEMBLY; IN-DEPTH STUDY; MICRO ASSEMBLY; MICRO PART; MODELING METHOD; NANOROBOTS; PROCESS PARAMETERS; SCANNING ELECTRON MICROSCOPES; SELF ALIGNMENT; SUCCESSFUL ASSEMBLY; TEST PLATFORMS; WATER DROPLETS;

EID: 78650056906     PISSN: 15523098     EISSN: None     Source Type: Journal    
DOI: 10.1109/TRO.2010.2066830     Document Type: Article
Times cited : (90)

References (48)
  • 1
    • 61549097435 scopus 로고    scopus 로고
    • 3-D integration technologies
    • Jan.
    • G. Campardo, G. Ripamonti, and R. Micheloni, "3-D integration technologies," Proc. IEEE, vol. 97, no. 1, pp. 5-8, Jan. 2009.
    • (2009) Proc. IEEE , vol.97 , Issue.1 , pp. 5-8
    • Campardo, G.1    Ripamonti, G.2    Micheloni, R.3
  • 3
    • 0028526886 scopus 로고
    • A robotic system for performing sub-millimetre grasping and manipulation tasks
    • R. A. Russell, "A robotic system for performing sub-millimetre grasping and manipulation tasks," Robot. Auton. Syst., vol. 13, pp. 209-218, 1994.
    • (1994) Robot. Auton. Syst. , vol.13 , pp. 209-218
    • Russell, R.A.1
  • 5
    • 0032650098 scopus 로고    scopus 로고
    • Visually servoed micropositioning for robotic micromanipulation
    • B. Vikramaditya and B. J. Nelson, "Visually servoed micropositioning for robotic micromanipulation," J. Microcomput. Appl., vol. 18, no. 1, pp. 23-31, 1999.
    • (1999) J. Microcomput. Appl. , vol.18 , Issue.1 , pp. 23-31
    • Vikramaditya, B.B.1    Nelson, J.2
  • 6
    • 0032312540 scopus 로고    scopus 로고
    • Visual servoing and CAD-driven microassembly
    • Dec.
    • J. T. Feddema and R. W. Simon, "Visual servoing and CAD-driven microassembly," IEEE Robot. Autom. Mag., vol. 5, no. 4, pp. 18-24, Dec. 1998.
    • (1998) IEEE Robot. Autom. Mag. , vol.5 , Issue.4 , pp. 18-24
    • Feddema, J.T.1    Simon, R.W.2
  • 8
    • 1942436713 scopus 로고    scopus 로고
    • Microassembly of 3-D microstructures using a compliant, passive microgripper
    • N. Dechev, W. L. Cleghorn, and J. K. Mills, "Microassembly of 3-D microstructures using a compliant, passive microgripper," J. Microelectromech. Syst., vol. 13, no. 2, pp. 176-189, 2004.
    • (2004) J. Microelectromech. Syst. , vol.13 , Issue.2 , pp. 176-189
    • Dechev, N.1    Cleghorn, W.L.2    Mills, J.K.3
  • 9
    • 3342910584 scopus 로고    scopus 로고
    • Automatic microassembly system assisted by vision servoing and virtual reality
    • Jun.
    • A. Ferreira, C. Cassier, and S. Hirai, "Automatic microassembly system assisted by vision servoing and virtual reality," IEEE/ASME Trans. Mechatron., vol. 9, no. 2, pp. 321-333, Jun. 2004.
    • (2004) IEEE/ASME Trans. Mechatron. , vol.9 , Issue.2 , pp. 321-333
    • Ferreira, A.1    Cassier, C.2    Hirai, S.3
  • 10
    • 0346319763 scopus 로고
    • Theory of selfassembly of hydrocarbon amphiphiles into micelles and bilayers
    • J. N. Israelachvili, D. J. Mitchell, and B. W. Ninham, "Theory of selfassembly of hydrocarbon amphiphiles into micelles and bilayers," J. Chem. Soc., Faraday Trans., vol. 2, pp. 341-365, 1976.
    • (1976) J. Chem. Soc., Faraday Trans. , vol.2 , pp. 341-365
    • Israelachvili, J.N.1    Mitchell, D.J.2    Ninham, B.W.3
  • 11
    • 0016844796 scopus 로고
    • Self-assembly of biological macromolecules
    • R. N. Perham, "Self-assembly of biological macromolecules," Philos. Trans. Roy. Soc. London B, vol. 272, no. 915, pp. 123-136, 1975.
    • (1975) Philos. Trans. Roy. Soc. London B , vol.272 , Issue.915 , pp. 123-136
    • Perham, R.N.1
  • 13
    • 0028445213 scopus 로고
    • Fluidic self-assembly for the integration of GaAs light-emitting diodes on Si substrates
    • Jun.
    • H.-J. J. Yeh and J. S. Smith, "Fluidic self-assembly for the integration of GaAs light-emitting diodes on Si substrates," IEEE Photon. Technol. Lett., vol. 6, no. 6, pp. 706-708, Jun. 1994.
    • (1994) IEEE Photon. Technol. Lett. , vol.6 , Issue.6 , pp. 706-708
    • Yeh, H.-J.J.1    Smith, J.S.2
  • 15
    • 0035278843 scopus 로고    scopus 로고
    • Microstructure to substrate self-assembly using capillary forces
    • DOI 10.1109/84.911087, PII S1057715701015967
    • U. Srinivasan, D. Liepmann, and R. T. Howe, "Microstructure to substrate self-assembly using capillary forces," J. Microelectromech. Syst., vol. 10, pp. 17-24, 2001. (Pubitemid 32287836)
    • (2001) Journal of Microelectromechanical Systems , vol.10 , Issue.1 , pp. 17-24
    • Srinivasan, U.1    Liepmann, D.2    Howe, R.T.3
  • 17
    • 0037192505 scopus 로고    scopus 로고
    • Self-assembly at all scales
    • G. M. Whitesides and B. Grzybowski, "Self-assembly at all scales," Science, vol. 295, pp. 2418-2421, 2002.
    • (2002) Science , vol.295 , pp. 2418-2421
    • Whitesides, G.M.1    Grzybowski, B.2
  • 18
    • 54949148405 scopus 로고    scopus 로고
    • Large scale self-assembly of crystalline semiconductor microcomponents onto plastic substrates via microfluidic traps
    • Washington, DC
    • S. Kim, E. Saeedi, J. Etzkorn, and B.A. Parviz, "Large scale self-assembly of crystalline semiconductor microcomponents onto plastic substrates via microfluidic traps," in Proc. 4th Annu. IEEE Conf. Autom. Sci. Eng., Washington, DC, 2008, pp. 967-970.
    • (2008) Proc. 4th Annu. IEEE Conf. Autom. Sci. Eng. , pp. 967-970
    • Kim, S.1    Saeedi, E.2    Etzkorn, J.3    Parviz, B.A.4
  • 19
    • 78650045379 scopus 로고    scopus 로고
    • Assémbleon. Pick & Place equipment. [Online]. Available
    • Assémbleon. Pick & Place equipment. (2009). [Online]. Available: http://www.assembleon.com/surface-mount-assembly/pickand-place- equipment/
    • (2009)
  • 20
    • 78650048823 scopus 로고    scopus 로고
    • FSA technology., Alien Technol. ,[Online]. Available
    • Alien Technol., FSA technology. (2010). [Online]. Available: http://www. alientechnology.com/fsa-manufacturing.php
    • (2010)
  • 21
    • 78650057043 scopus 로고
    • Miniature robot with micro capillary probe for surface clearing operation
    • H. Aoyama, F. Iwata, J. Fukaya, and A. Sasaki, "Miniature robot with micro capillary probe for surface clearing operation," J. Robot. Mechatron., vol. 7, no. 6, pp. 488-492, 1995.
    • (1995) J. Robot. Mechatron. , vol.7 , Issue.6 , pp. 488-492
    • Aoyama, H.1    Iwata, F.2    Fukaya, J.3    Sasaki, A.4
  • 22
    • 0022655537 scopus 로고
    • Observation of a single-beam gradient force optical trap for dielectric particles
    • A. Ashkin, J. M. Dziedzic, J. E. Bjorkholm, and S. Chu, "Observation of a single-beam gradient force optical trap for dielectric particles," Opt. Lett., vol. 11, pp. 288-290, 1986.
    • (1986) Opt. Lett. , vol.11 , pp. 288-290
    • Ashkin, A.1    Dziedzic, J.M.2    Bjorkholm, J.E.3    Chu, S.4
  • 23
    • 78650062750 scopus 로고    scopus 로고
    • Manipulation of micro-objects using adhesion forces and dynamical effects
    • S. Haliyo, S. Régnier, and Ph. Bidaud, "Manipulation of micro-objects using adhesion forces and dynamical effects," Exp. Robot. VIII, vol. 5, pp. 382-391, 2003.
    • (2003) Exp. Robot. VIII , vol.5 , pp. 382-391
    • Haliyo, S.1    Régnier, S.2    Bidaud, P.3
  • 24
    • 33645064258 scopus 로고    scopus 로고
    • Parallel micro component-tosubstrate assembly with controlled poses and high surface coverage
    • J. Fang and K. F. Böhringer, "Parallel micro component-tosubstrate assembly with controlled poses and high surface coverage," IOP J. Micromech. Microeng., vol. 16, pp. 721-730, 2006.
    • (2006) IOP J. Micromech. Microeng. , vol.16 , pp. 721-730
    • Fang, J.1    Böhringer, K.F.2
  • 25
    • 68149153270 scopus 로고    scopus 로고
    • Hybrid microhandling: A unified view of robotic handling and self-assembly
    • V. Sariola, Q. Zhou, and H. N. Koivo, "Hybrid microhandling: A unified view of robotic handling and self-assembly," J. Micro-Nano Mechatron., vol. 4, no. 1, pp. 5-16, 2008.
    • (2008) J. Micro-Nano Mechatron. , vol.4 , Issue.1 , pp. 5-16
    • Sariola, V.1    Zhou, Q.2    Koivo, H.N.3
  • 26
    • 78650052805 scopus 로고    scopus 로고
    • Unified view of robotic microhandling and selfassembly
    • M. Gauthier and S. Régnier, Eds. Piscataway, NJ: IEEE Press
    • Q. Zhou and V. Sariola, "Unified view of robotic microhandling and selfassembly," in Robotic Microassembly, M. Gauthier and S. Régnier, Eds. Piscataway, NJ: IEEE Press, 2010, pp. 109-144.
    • (2010) Robotic Microassembly , pp. 109-144
    • Zhou, Q.1    Sariola, V.2
  • 27
    • 34250629220 scopus 로고    scopus 로고
    • Microhandling using robotic manipulation and capillary self-alignment
    • Q. Zhou and B. Chang, "Microhandling using robotic manipulation and capillary self-alignment," in Proc. IEEE/RSJ Int. Conf. Intell. Robots Syst., 2006, pp. 5883-5888.
    • (2006) Proc. IEEE/RSJ Int. Conf. Intell. Robots Syst. , pp. 5883-5888
    • Zhou, Q.1    Chang, B.2
  • 30
    • 0037217585 scopus 로고    scopus 로고
    • Self-alignment ofmicroparts using liquid surface tension-behavior of micropart and alignment characteristics
    • K. Sato,K. Ito, S.Hata, andA. Shimokohbe, "Self-alignment ofmicroparts using liquid surface tension-behavior of micropart and alignment characteristics," Precision Eng., vol. 27, no. 1, pp. 42-50, 2003.
    • (2003) Precision Eng. , vol.27 , Issue.1 , pp. 42-50
    • Sato, K.1    Ito, K.2    Hata, S.3    Shimokohbe, A.4
  • 31
    • 34548185753 scopus 로고    scopus 로고
    • Self-alignment of microchips using surface tension and solid edge
    • C. G. Tsai, C. M. Hsieh, and J. A. Yeh, "Self-alignment of microchips using surface tension and solid edge," Sens. Actuators, A, vol. 139, no. 1-2, pp. 343-349, 2007.
    • (2007) Sens. Actuators, A , vol.139 , Issue.1-2 , pp. 343-349
    • Tsai, C.G.1    Hsieh, C.M.2    Yeh, J.A.3
  • 33
    • 33847077260 scopus 로고    scopus 로고
    • Oscillation of a tilted circular pad on a droplet for the self-alignment process
    • M. Kaneda,M.Yamamoto, K. Nakaso, T.Yamamoto, and J. Fukai, "Oscillation of a tilted circular pad on a droplet for the self-alignment process," Precision Eng., vol. 31, no. 2, pp. 177-184, 2007.
    • (2007) Precision Eng. , vol.31 , Issue.2 , pp. 177-184
    • Kaneda, M.1    Yamamoto, M.2    Nakaso, K.3    Yamamoto, T.4    Fukai, J.5
  • 34
    • 33747366435 scopus 로고    scopus 로고
    • Surface and contact forces models within the framework of microassembly
    • P. Lambert and S. Régnier, "Surface and contact forces models within the framework of microassembly," J. Micromechatron., vol. 3, no. 2, pp. 123-157, 2006.
    • (2006) J. Micromechatron. , vol.3 , Issue.2 , pp. 123-157
    • Lambert, P.1    Régnier, S.2
  • 35
    • 3042608858 scopus 로고    scopus 로고
    • Modelling, simulation and experimentation of a promising new packaging technology-Parallel fluidic self-assembly of micro devices
    • J. Lienemann, A. Greiner, J. G. Korvink, X. Xiong, Y. Hanein, and K. F. Böhringer, "Modelling, simulation and experimentation of a promising new packaging technology-Parallel fluidic self-assembly of micro devices," Sens. Update, vol. 13, no. 1, pp. 3-43, 2003.
    • (2003) Sens. Update , vol.13 , Issue.1 , pp. 3-43
    • Lienemann, J.1    Greiner, A.2    Korvink, J.G.3    Xiong, X.4    Hanein, Y.5    Böhringer, K.F.6
  • 40
    • 0026346152 scopus 로고
    • The importance of assessing the fit of logistic regression models: A case study
    • D.W. Hosmer, S. Taber, and S. Lemeshow, "The importance of assessing the fit of logistic regression models: a case study," Amer. J. Public Health, vol. 81, no. 12, pp. 1630-1635, 1991.
    • (1991) Amer. J. Public Health , vol.81 , Issue.12 , pp. 1630-1635
    • Hosmer, D.W.1    Taber, S.2    Lemeshow, S.3
  • 42
    • 77956282193 scopus 로고    scopus 로고
    • A Bayesian approach to parameter estimation in binary logit and probit models
    • D. Tektas and S. Günay, "A Bayesian approach to parameter estimation in binary logit and probit models," Hacettepe J. Math. Statist., vol. 37, no. 2, pp. 167-176, 2008.
    • (2008) Hacettepe J. Math. Statist. , vol.37 , Issue.2 , pp. 167-176
    • Tektas, D.1    Günay, S.2
  • 43
    • 33947509685 scopus 로고    scopus 로고
    • The use of logit and probit models in strategic management research: Critical issues
    • G. Hoetker, "The use of logit and probit models in strategic management research: Critical issues," Strat. Mgmt. J., vol. 28, pp. 331-343, 2007.
    • (2007) Strat. Mgmt. J. , vol.28 , pp. 331-343
    • Hoetker, G.1
  • 44
    • 0042333228 scopus 로고    scopus 로고
    • Liquid dispensing encapsulation in semiconductor packaging
    • L.Yang, C. K. King, and J. B. Bernstein, "Liquid dispensing encapsulation in semiconductor packaging," Microelectron. Int., vol. 20, no. 3, pp. 29-35, 2003.
    • (2003) Microelectron. Int. , vol.20 , Issue.3 , pp. 29-35
    • Yang, L.1    King, C.K.2    Bernstein, J.B.3
  • 45
    • 77949360167 scopus 로고    scopus 로고
    • Three dimensional hybrid microassembly combining robotic microhandling and self-assembly
    • V. Sariola, Q. Zhou, and H. N. Koivo, "Three dimensional hybrid microassembly combining robotic microhandling and self-assembly," in Proc. IEEE Int. Conf. Robot. Autom., 2009, pp. 2605-2610.
    • (2009) Proc. IEEE Int. Conf. Robot. Autom. , pp. 2605-2610
    • Sariola, V.1    Zhou, Q.2    Koivo, H.N.3
  • 47
    • 24944541142 scopus 로고    scopus 로고
    • Novel high precision optoelectronic device fabrication technique using guided fluidic assembly
    • B. P. Singh, K. Onozawa, K. Yamanaka, T. Tojo, and D. Ueda, "Novel high precision optoelectronic device fabrication technique using guided fluidic assembly," Opt. Rev., vol. 12, no. 4, pp. 345-351, 2005.
    • (2005) Opt. Rev. , vol.12 , Issue.4 , pp. 345-351
    • Singh, B.P.1    Onozawa, K.2    Yamanaka, K.3    Tojo, T.4    Ueda, D.5


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.