Assembly of micro-optical devices using magnetic actuation

Sensors and Actuators, A: Physical

Volumn 78, Issue 2, 1999, Pages 205-211

  Yi, Yong W ^a   Liu, Chang ^a  

^a UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DIFFRACTION GRATINGS; HELIUM NEON LASERS; MAGNETIC FIELDS; MICROOPTICS; MIRRORS; OPTICAL CORRELATION; OPTICAL INSTRUMENT LENSES;

FLEXURAL BEAM LOADING MECHANISMS; MAGNETIC ACTUATION;

ACTUATORS;

EID: 0033361750     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(99)00228-9     Document Type: Article

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