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IEEE Journal on Selected Topics in Quantum Electronics

Volumn 8, Issue 1, 2002, Pages 4-11

Fluidic self-assembly of micromirrors onto microactuators using capillary forces

(5) Srinivasan, Uthara b Helmbrecht, Michael A c Rembe, Christian d Muller, Richard S a,c Howe, Roger T a,c

a IEEE

b University of California (United States)

c UNIVERSITY OF CALIFORNIA (United States)

d UNIVERSITY OF CALIFORNIA (United States)

Author keywords

Adaptive optics; Fluidic self assembly; Microassembly; Micromirrors

Indexed keywords

ADAPTIVE OPTICS; ADHESIVES; ASSEMBLY MACHINES; ETCHING; MICROACTUATORS; MICROMACHINING; MIRRORS; PHOTOLITHOGRAPHY; SEMICONDUCTING SILICON;

FLUIDIC SELF ASSEMBLY; MICROMIRRORS;

MICROELECTROMECHANICAL DEVICES;

EID: 0036244186 PISSN: 1077260X EISSN: None Source Type: Journal
DOI: 10.1109/2944.991393 Document Type: Article

Times cited : (86)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.