SCOPUS 정보 검색 플랫폼

Journal of Microelectromechanical Systems

Volumn 10, Issue 1, 2001, Pages 17-24

Microstructure to substrate self-assembly using capillary forces

(3) Srinivasan, Uthara b Liepmann, Dorian c Howe, Roger T a,d

a IEEE

b UNIVERSITY OF CALIFORNIA (United States)

c University of California (United States)

d UNIVERSITY OF CALIFORNIA (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BINDING ENERGY; CAPILLARY FLOW; INTERFACES (MATERIALS); MICROMACHINING; MONOLAYERS; PHOTOLITHOGRAPHY; SEMICONDUCTING FILMS; SILICON ON INSULATOR TECHNOLOGY; SUBSTRATES;

ADHESIVE-COATED SUBSTRATES; HYDROPHOBIC SELF-ASSEMBLED MONOLAYERS;

SILICON WAFERS;

EID: 0035278843 PISSN: 10577157 EISSN: None Source Type: Journal
DOI: 10.1109/84.911087 Document Type: Article

Times cited : (389)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.