Active release of microobjects using a MEMS microgripper to overcome adhesion forces

Journal of Microelectromechanical Systems

Volumn 18, Issue 3, 2009, Pages 652-659

  Chen, Brandon K ^a   Zhang, Yong ^a   Sun, Yu ^a  

^a UNIVERSITY OF TORONTO   (Canada)

Author keywords

Active release; Adhesion forces; Adhesives; Electrostatics; Force; Grippers; Microelectromechanical systems (MEMS) microgripper; Micromanipulation; Rough surfaces; Scaling laws; Substrates; Surface roughness

Indexed keywords

ACTIVE RELEASE; ADHESION FORCES; FORCE; MICROELECTROMECHANICAL SYSTEMS (MEMS) MICROGRIPPER; MICROMANIPULATION; ROUGH SURFACES;

ADHESION; ADHESIVES; BOROSILICATE GLASS; DISSOCIATION; ELECTROSTATICS; GRIPPERS; MECHATRONICS; MEMS; MICROELECTROMECHANICAL DEVICES; MICROMANIPULATORS; SCALING LAWS; SUBSTRATES; SURFACE MEASUREMENT; SURFACE PROPERTIES; SURFACE ROUGHNESS;

COMPOSITE MICROMECHANICS;

EID: 67549135486     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2009.2020393     Document Type: Article

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