메뉴 건너뛰기




Volumn 292, Issue , 2014, Pages 74-85

Surface/interface analysis and optical properties of RF sputter-deposited nanocrystalline titanium nitride thin films

Author keywords

Ellipsometry; Optical properties; Thin films; Titanium nitride; XPS

Indexed keywords

ATOMIC FORCE MICROSCOPY; CHEMICAL ANALYSIS; DEPOSITION; ELLIPSOMETRY; FLOW OF GASES; FLOW RATE; NANOCRYSTALS; NITROGEN; OPTICAL PROPERTIES; PHASE INTERFACES; SCANNING ELECTRON MICROSCOPY; SPECTROSCOPIC ELLIPSOMETRY; THIN FILMS; TITANIUM DIOXIDE; TITANIUM NITRIDE; X RAY PHOTOELECTRON SPECTROSCOPY;

EID: 84893679431     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2013.11.078     Document Type: Article
Times cited : (58)

References (72)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.