Durable TiN/TiNx metallic contacts for solar cells

Thin Solid Films

Volumn 511-512, Issue , 2006, Pages 453-456

  Matenoglou, G M ^a   Logothetidis, S ^a   Kassavetis, S ^a  

^a ARISTOTLE UNIVERSITY OF THESSALONIKI   (Greece)

Author keywords

Enhanced adhesion; Scratch test; Spectroscopic ellipsometry; Sputtering; Titanium nitride

Indexed keywords

MAGNETRON SPUTTERING; MECHANICAL PROPERTIES; METALLIC FILMS; STOICHIOMETRY; SUBSTRATES; TITANIUM NITRIDE;

ENHANCED ADHESION; SCRATCH TEST; SPECTROSCOPIC ELLIPSOMETRY;

SOLAR CELLS;

EID: 33646582012     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2005.12.117     Document Type: Article

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