Cu crystallographic texture control in Cu/refractory-metal layered structure as interconnects

Applied Physics Letters

Volumn 71, Issue 19, 1997, Pages 2782-2784

  Abe, Kazuhide ^a   Harada, Yusuke ^a   Onoda, Hiroshi ^a  

^a OKI ELECTRIC INDUSTRY CO   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000635468     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.120132     Document Type: Article

References (10)

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