Synthesis and characterization of titanium and zirconium oxynitride coatings

Thin Solid Films

Volumn 517, Issue 21, 2009, Pages 5956-5964

  Rizzo, A ^a   Signore, M A ^a   Mirenghi, L ^a   Di Luccio, T ^b  

^a Centro Ricerche Brindisi   (Italy)

^b ENEA   (Italy)

Author keywords

Sputtering process; Titanium oxynitride; X ray diffraction; X ray photoelectron spectroscopy; Zirconium oxynitride

Indexed keywords

[A] GROWTH MODELS; COMPOSITIONAL ANALYSIS; CUBIC STRUCTURE; FILM STRUCTURE; MULTILAYER GROWTH; MULTILAYER STRUCTURES; NITROGEN ATMOSPHERES; NITROGEN ATOM; NITROGEN VACANCIES; OXYGEN ATOM; OXYNITRIDE; OXYNITRIDE LAYERS; RADIO FREQUENCY MAGNETRON SPUTTERING; ROOM TEMPERATURE; SATELLITE PEAKS; SI (100) SUBSTRATE; SPUTTERING PROCESS; STACKED STRUCTURE; SYNTHESIS AND CHARACTERIZATION; TITANIUM OXYNITRIDE;

ARGON; ATOMS; CRYSTAL ATOMIC STRUCTURE; DIFFRACTION; ELECTRON SPECTROSCOPY; FILM PREPARATION; MULTILAYER FILMS; MULTILAYERS; NITRIDES; NITROGEN; OXYGEN; OXYGEN VACANCIES; PHOTOELECTRICITY; PHOTOIONIZATION; PHOTONS; SPECTRUM ANALYSIS; STOICHIOMETRY; STRUCTURAL ANALYSIS; TITANIUM; X RAY DIFFRACTION; X RAY DIFFRACTION ANALYSIS; X RAYS; ZIRCONIUM;

X RAY PHOTOELECTRON SPECTROSCOPY;

EID: 67449115796     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2009.03.131     Document Type: Article

References (35)

1. Fraunchy R. Surf. Sci. Rep. 38 (2000) 195
2. Chappé J.M., Gavoille J., Martin N., Lintymer J., and Takadoum J. J. Mater. Sci. 41 (2006) 5639
3. Wendel J., Lerch M., and Laqua W. J. Solid State Chem. 142 (1999) 163
4. Hock R., Lerch M., Knight K.S., and Boysen H. Z. Kristallogr. Suppl. 9 (1995) 298
5. Sharma R., Naedele D., and Schweda E. Chem. Mater. 13 (2001) 4014
6. Yang X., Li C., Yang B., Wang W., and Qian Y. Chem. Phys. Lett. 383 (2004) 502
7. Yang H., and McCormick P.G. J. Mater. Sci. 28 (1993) 5663
8. Carvalho P., Vaz F., Rebouta L., Cunha L., Tavares C.J., Moura C., Alves E., Cavaleiro A., Goudeau Ph., Le Bourhis E., Rivière J.P., Pierson J.F., and Banakh O. J. Appl. Phys. 98 (2005) 23715
9. Herman D., Sicha J., and Musil J. Vacuum 81 (2006) 285
10. Martin N., Banakh O., Santo A.M.E., Springer S., Sanjinés R., Takadoum J., and Lévy F. Appl. Surf. Sci. 185 (2001) 123
11. Rizzo A., Signore M.A., De Riccardis M.F., Capodieci L., Dimaio D., and Nocco T. Thin Solid Films 515 (2007) 6665
12. Dementjev A.P., de Graaf U.A., van de Sanden M.C.M., Maslakov K.I., Naumkin A.V., and Serov A.A. Diamond Relat. Mater. 9 (2000) 1904
13. JCPDS-International Centre for Diffraction Data Copyright (C) JCPDSICDD 2000.
14. Lerch M., Krumeich F., and Hock R. Solid State Ionics 95 (1997) 87
15. Chappè J.M., Martin N., Lintymer J., Sthal F., Terwagne G., and Takadoum J. Appl. Surf. Sci. 253 (2007) 5312
16. Yang X., Li C., Yang B., Wang W., and Qian Y. Chem. Phys. Lett. 383 (2004) 502
17. Vaz F., Cerqueira P., Rebouta L., Nascimento S.M.C., Alves E., Goudeau Ph., Riviere J.P., Pishow K., and de Rijk J. Thin Solid Films 447-448 (2004) 449
18. Vaz F., Carvalho P., Cunha L., Rebouta L., Moura C., Alves E., Ramos A.R., Cavaleiro A., Goudeau Ph., and Riviere J.P. Thin Solid Films 469-470 (2004) 11
19. Pietsch U., Holý V., and Baumbach T. High Resolution X-ray Scattering from Thin Films to Lateral Nanostructures (2004) New York, Berlin, Heidelberg: Springer
20. Wiame H., Centeno M.A., Picard S., Bastians P., and Grange P. J. Eur. Ceram. Soc. 18 (1998) 1293
21. Signore M.A., Rizzo A., Mirenghi L., Tagliente M.A., and Cappello A. Thin Solid Films 515 (2007) 6798
22. Lerch M., Fueglein E., and Wrba J. Z. Anorg. Allg. Chem. 622 (1996) 367
23. Del Re M., Gouttebaron R., Dauchot J.P., Leclère P., Terwagne G., and Hecq M. Surf. Coat. Technol. 174 (2003) 240
24. Vyas A., Li K.Y., Zhou Z.F., and Shen Y.G. Surf. Coat. Technol. 200 (2005) 2293
25. Qin C.L., Oak J.J., Ohtsu N., Asami K., and Inoue A. Acta Mater. 55 (2007) 2057
26. Berg S., Blom H.O., Larsson T., and Nender C. J. Vac. Sci. Technol. A 5 (1987) 202
27. Hoffmann D.W., and Thornton J.A. J. Vac. Sci. Technol. 17 (1980) 380
28. Yokota K., Tamura S., Nakamura K., Horiguchi M., Nakaiwa H., Sugimoto T., Akamatsu K., and Nakao K. Nucl. Instrum. Methods B 166 (2000) 82
29. M. Matsuoka, S. Isotani, W. Sucasaire, N. Kuratani, K. Ogata, Surf. Coat. Technol. 202 3129.
30. L. Pichon, T. Girardeau, A. Straboni, F. Lignou, P. Guerin, J. Perriere, Appl. Surf. Sci. 150 115.
31. Rizzo A., Alvisi M., Sarto F., Scaglione S., and Vasanelli L. Surf. Coat. Technol. 108 (1998) 297
32. Muller K.H., Netterfield R.P., and Martin P.J. Phys. Rev. B 35 (1987) 2934
33. Mǐsina M., Shaginyan L.R., Mǎcek M., and Panjan P. Surf. Coat. Technol. 142 (2001) 348
34. Wang S.G., Wen X.D., Cao D.B., Li Y.W., Wang J., and Jiao H. Surf. Sci. 577 (2005) 69
35. Mohamed S.H., Kappertz O., Ngaruya J.M., Niemeier T., Drese R., Detemple R., Wakkad M.M., and Wuttig M. Phys. Stat. Sol. (a) 201 (2004) 90