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Volumn 142-144, Issue , 2001, Pages 206-210
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Influence of two reactive gases on the instabilities of the reactive sputtering process
a
a
EPFL
(Switzerland)
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Author keywords
Oxynitride coatings; Reactive sputtering; Ti(OxNy)
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Indexed keywords
DEPOSITION;
NITROGEN;
OXYGEN;
REACTION KINETICS;
REACTIVE GASES;
COATINGS;
SPUTTERING;
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EID: 0035387824
PISSN: 02578972
EISSN: None
Source Type: Journal
DOI: 10.1016/S0257-8972(01)01195-1 Document Type: Article |
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Times cited : (26)
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References (18)
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