Optimization of plasma parameters for high rate deposition of titanium nitride films as protective coating on bell-metal by reactive sputtering in cylindrical magnetron device

Applied Surface Science

Volumn 254, Issue 18, 2008, Pages 5760-5765

  Borah, Sankar Moni ^a   Pal, Arup Ratan ^a   Bailung, Heremba ^a   Chutia, Joyanti ^a  

^a INSTITUTE OF ADVANCED STUDY IN SCIENCE AND TECHNOLOGY   (India)

Author keywords

Anti corrosive; Bell metal; Cylindrical magnetron; Nano structured titanium nitride thin film; Reactive sputtering

Indexed keywords

MAGNETRONS; NANOSTRUCTURED MATERIALS; PROTECTIVE COATINGS; REACTIVE SPUTTERING; SCANNING ELECTRON MICROSCOPY; TITANIUM NITRIDE; X RAY DIFFRACTION;

CYLINDRICAL MAGNETRON; FILM COATING;

THIN FILMS;

EID: 44349118471     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2008.03.047     Document Type: Article

References (48)

1. Chandra R., Chawla A.K., Kaur D., and Ayyub P. Nanotechnology 16 (2005) 3053
2. Xuan-qian Xu, Ye H., and Zou T. J. Zhejiang Univ. Sci. A 7 3 (2006) 472
3. Arnell R.D., Colligon J.S., Minnebaev K.F., and Yurasova V.E. Vacuum 47 5 (1996) 425
4. Diesselberg M., Stock H.-R., and Mayr P. Surf. Coat. Technol. 177-178 (2004) 399
5. Gicquel A., Laidani N., Saillard P., and Amouroux J. Pure Appl. Chem. 62 9 (1990) 1743
6. Szikora B. Vacuum 50 3-4 (1998) 273
7. Glass R.C., Spellman L.M., Tanaka S., and Davis R.F. J. Vac. Sci. Technol. A 10 (1992) 1625
8. Murarka S.P., Gutmann R.J., Kaloyeros A.E., and Lanford W.A. Thin Solid Films 236 (1993) 257
9. Tarniowy A., Mania R., and Rekas M. Thin Solid Films 311 (1997) 93
10. Dimitriadis C.A., Lee J.I., Patsalas P., Logothetidis S., Tassis D.H., Brini J., and Kamarinos G. J. Appl. Phys. 85 (1999) 4238
11. Patsalas P., Charitidis C., Logothetidis S., Dimitriadis C.A., and Valassiades O. J. Appl. Phys. 86 (1999) 5296
12. Niyomsoan S., Grant W., Olson D.L., and Mishra B. Thin Solid Films 415 (2002) 187
13. Chatterjee S., Chanrashekhar S., and Sudarshan T.S. J. Mater. Sci. 27 (1992) 3409
14. Schreckenbach J., Schlottig F., Dietrich D., Hofmann A., and Merx G. J. Mater. Sci. 14 (1995) 1344
15. Russell S.W., Rack M.J., Adams D., and Alford T.L. J. Electrochem. Soc. 143 (1996) 2349
16. Jimenez C., and Langlet M. Surf. Coat. Technol. 68-69 (1994) 249
17. Igasaki Y., and Mitsuhashi H. Thin Solid Films 70 (1980) 17
18. Wittmer M., and Melchior H. Thin Solid Films 93 (1982) 397
19. Hibbs M.K., Sundgren J.-E., Jaccobson B.E., and Johansson B.-O. Thin Solid Films 107 (1983) 149
20. Kumar N., Pourrezaei K., Fissel M., Begley T., Lee B., and Douglas E.C. J. Vac. Sci. Technol. 5A (1987) 1778
21. Joswig H., Kohlhase A., and Kucher P. Thin Solid Films 175 (1989) 17
22. Tsai W., Fair J., and Hodul D. J. Electrochem. Soc. 139 (1992) 2004
23. Kawamura M., Abe Y., Yanagisawa H., and Sasaki K. Thin Solid Films 287 (1996) 115
24. Musil J., Bardos L., Rajsky A., Vyskocil J., Dolezal B., Loncar G., Dadourek K., and Kubicek V. Thin Solid Films 136 (1986) 229
25. Sproul W.D., Rudnik P.J., and Graham M.E. Surf. Coat. Technol. 39-40 (1989) 355
26. Yang S., Lewis D.B., Wadsworth I., Cawley J., Brooks J.S., and Munz W.D. Surf. Coat. Technol. 131 (2000) 228
27. Diesselberg M., Stock H.-R., Cremer R., and Fuss H.-G. Surf. Coat. Technol. 200 (2005) 1604
28. Ahern M., and Hashmi M.S.J. Surf. Coat. Technol. 50 (1992) 249
29. Baba K., and Hatada R. Surf. Coat. Technol. 66 (1994) 368
30. Jiang H., Tao K., and Li H. Thin Solid Films 258 (1995) 51
31. Greene J.E., Sundgren J.-E., Hultman L., Petrov I., and Bergstrom D.B. Appl. Phys. Lett. 67 20 (1995) 2928
32. Hultman L., Sundgren J.-E., Greene J.E., Bergstrom D.B., and Petrov I. J. Appl. Phys. 78 9 (1995) 5395
33. Banerjee R., Chandra R., and Ayyub P. Thin Solid Films 405 (2002) 64
34. Iordanova I., Kelly P.J., Mirchev R., and Antonov V. Vacuum 81 (2007) 830
35. Richter F., Kupfer H., Schaarschmidt G., Scholze F., Elstner F., and Hecht G. Surf. Coat. Technol. 54-55 (1992) 338
36. Harma H., Inoue T., Nakashima S., Okumura H., Ihasida Y., Yoshida S., Koizumi T., Grille H., and Bechsted F. Appl. Phys. Lett. 74 (1999) 191
37. Hohl F., Stok H.-R., and Mayr P. Surf. Coat. Technol. 54-55 (1992) 160
38. Bhat J.S., Maddani K.I., and Karguppikar A.M. Bull. Mater. Sci. 29 3 (2006) 331
39. Bradley R.M., Harper J.M.E., and Smith D.A. J. Appl. Phys. 60 (1986) 4160
40. Bradley R.M., Harper J.M.E., and Smith D.A. J. Vac. Sci. Technol. A 5 (1987) 1792
41. Hultman L., Münz W.-D., Musil J., Kadlec K., Petrov I., and Greene J.E. J. Vac. Sci. Technol. A 9 (1991) 434
42. Knuyt G., Quaeyhaegens C., D'Haen J., and Stals L.M. Thin Solid Films 258 (1995) 159
43. Knuyt G., Quaeyhaegens C., D'Haen J., and Stals L.M. Surf. Coat. Technol. 76-77 (1995) 311
44. Cullity B.D. Elements of X-Ray Diffraction (1978), Addison-Wesley Publishing Co., Reading, MA
45. Nema S.K., Raole P.M., Mukherjee S., Kikani P., and John P.I. Surf. Coat. Technol. 179 (2004) 193
46. Randall N.X., Schmutz C.J., and Soro J.M. Surf. Coat. Technol. 108-109 (1998) 489
47. Wang K.Y., Shen T.D., Quan M.X., and Wei W.D. J. Mater. Sci. Lett. 12 23 (1993) 1818
48. Carter V.E. Corrosion Testing for Metal Finishing vol. 53 (1982), Institute of Metal Finishing, Butterworth Scientific, Birmingham