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Volumn 41, Issue 11, 2012, Pages 3139-3144

Crystal structure and morphology of nanocrystalline TiN thin films

Author keywords

Crystal structure; Lattice constant morphology; Reactive sputtering; Texturing; TiN films

Indexed keywords

CRYSTAL STRUCTURE AND MORPHOLOGY; GRAZING INCIDENCE X-RAY DIFFRACTION; NANOCRYSTALLINES; NITROGEN CONTENT; NITROGEN GAS FLOW; NITROGEN INCORPORATION; PREFERRED ORIENTATIONS; RADIO FREQUENCY MAGNETRON SPUTTERING; REACTIVE GAS MIXTURES; TIN COATING; TIN FILMS; TIN LAYERS; TIN THIN FILMS;

EID: 84868552453     PISSN: 03615235     EISSN: None     Source Type: Journal    
DOI: 10.1007/s11664-012-2198-z     Document Type: Article
Times cited : (12)

References (42)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.