메뉴 건너뛰기




Volumn 519, Issue 22, 2011, Pages 7702-7706

Conductive-atomic force microscopy study of local electron transport in nanostructured titanium nitride thin films

Author keywords

Conductive atomic force microscopy; Conductivity; Sputtering; Thin films; Titanium nitride

Indexed keywords

CONDUCTIVE-ATOMIC FORCE; CURRENT FLOWS; ELECTRICALLY CONDUCTIVE; ELECTRON TRANSPORT; FOUR-PROBE TECHNIQUES; GRAIN BOUNDARY RESISTANCE; GRAIN INTERIORS; LOCAL VARIATIONS; NANOSTRUCTURED TITANIUM; NITRIDE THIN FILMS; PERCOLATION PATH; POTENTIAL BARRIERS; TOPOGRAPHY MEASUREMENT; TOTAL RESISTANCE;

EID: 80052132146     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2011.05.052     Document Type: Article
Times cited : (14)

References (31)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.