ZnO and ZnO-Related Compounds

Pulsed Laser Deposition of Thin Films: Applications-Led Growth of Functional Materials

Volumn , Issue , 2006, Pages 261-289

  Perrière, Jacques ^a   Millon, Eric ^b   Craciun, Valentin ^c  

^a SORBONNE UNIVERSITÉ   (France)

^b Laboratoire de Spectrometrie de Masse et de Chimie Laser   (France)

^c UNIVERSITY OF FLORIDA   (United States)

Author keywords

Laser ablation and nanocomposite film formation; ZnO and ZnO related compounds; ZnO nanocrystalline films and ZnO based nanocomposites

Indexed keywords

EID: 84889352712     PISSN: None     EISSN: None     Source Type: Book    
DOI: 10.1002/9780470052129.ch12     Document Type: Chapter

References (126)

1. Albert, O., Roger, S., Glinec, Y., Loulergue, J. C., Etchepare, J., Boulmer-Leborgne, C., Perrière, J., and Millon, E. (2003), Appl. Phys. A76, 319.
2. Ashkenov, N., Mbenkum, B. N., Bundesmann, C., Riede, V., Lorenz, M., Spemann, D., Kaidashev, E. M., Kasic, A., Schubert, M., Grundmann, M., Wagner, G., Neumann, H., Darakchieva, V., Arwin, H., and Monemar, B. (2003), J. Appl. Phys. 93, 126.
3. Ashrafi, A. B. M., Ueta, A., Avramescu, A., Kumano, H., Suemune, I., Ok, Y. W., and Seong T. Y. (2000), Appl. Phys. Lett. 76, 550.
4. Bae, S. H., Lee, S. Y., Jin, B. J., and Im, S. (2000), Appl. Surf. Sci. 154/155, 458.
5. Bae, S. H., Lee, S. Y., Jin, B. J., and Im, S. (2001), Appl. Surf. Sci. 169/170, 525.
6. Bagnall, D. M., Chen, Y. F., Zhu, Z., Yao, T., Koyoma, S., Shen, M. Y., and Goto, T. (1997), Appl. Phys. Lett. 70, 2230.
7. Basillais, A., Laidani, N., Boulmer-Leborgne, C., Mathias, J., Laurent, A., and Perrière, J. (2000), Appl. Phys. A 71, 619.
8. Cao, H., Zhao, Y. G., Hong, H. C, Ho, S. T., Dai, J. Y., Wu, J. Y., and Chang, R. P. H. (1998), Appl. Phys. Lett. 73, 3656.
9. Cao, H., Zhao, Y. G., Ho, S. T., Seelig, E.W., Wang, Q. H., and Chang, R. P. H. (1999), Phys. Rev. Lett. 82, 2278.
10. Cao, H., Xu, J. Y., Seelig, E. W., and Chang, R. P. H. (2000), Appl. Phys. Lett. 76, 2997.
11. Chen, Y., Bagnall, D. M., Koh, H. J., Park, K. T., Hiraga, K., Zhu, Z., and Yao, T. (1998), J. Appl. Phys. 84, 3912.
12. Chen, Y., Ko, H. J., Hong, S. K., and Yao, T. (2000a), Appl. Phys. Lett. 76, 559.
13. Chen, Y., Hong, S. K., Ko, H. J., Nakajima, M., and Yao, T. (2000b), Appl. Phys. Lett. 76, 245.
14. Chen, M., Wang, X., Yu, Y. H., Pei, Z. L., Bai, X. D., Sun, C., Huang, R. F., andWen, L. S. (2000c), Appl. Surf. Sci. 158, 134.
15. Chia, C. H., Makino, T., Tamura, K., Segawa, Y., Kawasaki, M., Ohtomo, A., and Koinuma, H. (2003), Appl. Phys. Lett. 82, 1848.
16. Choopun, S., Vispute, R. D., Noch, W., Balsamo, A., Sharma, R. P., Venkatesan, T., Lliadis, A., and Lock, D. C. (1999), Appl. Phys. Lett. 75, 3947.
17. Claeyssens, F., Cheesman, A., Henley, S. J., and Ashfold, M. N. R. (2002), J. Appl. Phys. 92, 6886.
18. Craciun, V., and Craciun, D. (1999), Appl. Surf. Sci. 138/139, 218.
19. Craciun, V., Elders, J., Gardeniers, J. G. E., and Boyd, I. W. (1994), Appl. Phys. Lett. 65, 2963.
20. Craciun, V., Amirhaghi, S., Craciun, D., Elders, J., Gardeniers, J. G. E., and Boyd, I.W. (1995), Appl. Surf. Sci. 86, 99.
21. Craciun, V., Perrière, J., Bassim, N., Singh, R. K., Craciun, D., and Spear, J. (1999), Appl. Phys. A 69, 5533.
22. Craciun, V., Singh, R. K., Perrière, J., Spear, J., and Craciun, D. (2000), J. Electrochem. Soc. 147, 1077.
23. Dietl, T., Ohno, H., Matsukara, F., Cibert, J., and Ferrand, D. (2000), Science 287, 1019.
24. Dinescu, M., Verardi, P., Boulmer-Leborgne, C., Gerardi, C., Mirenghi, L., and Sandu, V. (1998), Appl. Surf. Sci. 127-129, 559.
25. Dinh, L. M., Schildbach, M. A., Balooch, M., and McLean II, W. M. (1999), J. Appl. Phys. 86, 1149.
26. Fukumura, T., Jin, Z., Ohtomo, A., Koinuma, H., and Kawasaki, M. (1999), Appl. Phys. Lett. 75, 2366.
27. Goria, C. R., Emanetoglu, N.W., Liang, S., Mayo, W. E., Lu, Y., Wraback, M., and Shen, H. (1999), J. Appl. Phys. 85, 2595.
28. Guillot-Noel, O., Gomez-San Roman, R., Perrière, J., Hermann, J., Boulmer-Leborgne, C., and Barboux, P. (1996), J. Appl. Phys. 80, 1803.
29. Henley, S. J., Ashfold, M. N. R., and Cherns, D. (2002), Thin Solid Films 422, 69.
30. Hiramatsu, M., Imaeda, K., Horio, N., and Nawata, M. (1998), J. Vac. Sci. Technol. A16, 669.
31. Hosono, H., Ohta, H., Hayashi, K., Orita, M., and Hirano, M. (2002), J. Crystal Growth 237-239, 496.
32. Hu, J., and Gordon, R. G. (1992), J. Appl. Phys. 71, 880.
33. Ianno, N. J., McConville, L., Shaikh, N., Pittal, S., and Snyder, P. G. (1992), Thin Solid Films 220, 92.
34. Im, S., Jin, B. J., and Yi, S. (2000), J. Appl. Phys. 87, 4558.
35. Jin, B. J., Bae, S. H., Lee, S. Y., and Im, S. (2000a), Mater. Sci. Eng. B71, 301.
36. Jin, B. J., Im, S., and Lee, S. Y. (2000b), Thin Solid Films 366, 107.
37. Jin, B. J., Woo, H. S., Im, S., Bae, S. H., and Lee, S. Y. (2001a), Appl. Surf. Sci. 169/170, 521.
38. Jin, Z., Fukumora, T., Kawasaki, M., Ando, K., Saito, H., Sekigushi, T., Yoo, Y. Z., Murakami, M., Matsumoto, Y., Hasegawa, T., and Koinuma, H. (2001b), Appl. Phys. Lett. 79, 3824.
39. Joseph, M., Tabata, H., and Kawai, T. (1999), Jpn. J. Appl. Phys. 38, L1205.
40. Joseph, M., Tabata, H., Saeki, H., Ueda, K., and Kawai, T. (2000), Physica B 302/303, 140.
41. Kaidashev, E. M., Lorenz, M., Von Weackstern, H., Rahn, A., Semmelhack, H. C., Han, K. H, Benndorf, G., Bundesmann, C., Hochmuth, H., and Grundmann, M. (2003), Appl. Phys. Lett. 82, 3901.
42. Kang, H. B., Nakamura, K., Lim, S. H., and Shindo, D. (1998), Jpn. J. Appl. Phys. 37, 781 (1998).
43. Kim, H., Gilmore, C. M., Horwitz, J. S., Pique, A., Murata, H., Kushto, G. P., Schlaf, R., Kafafi, Z. H., and Chrisey, D. B. (2000), Appl. Phys. Lett. 76, 259.
44. Kim, J. H., Kim, H., Kim, D., Ihm, Y. E., and Choo, W. K. (2003a), Physica B 327, 304.
45. Kim, S. K., Jeong, S. Y., and Cho, C. R. (2003b), Appl. Phys. Lett. 82, 562.
46. Koida, T., Chichibu, S. G., Uedano, A., Tsukazaki, A., Kawasaki, M., Sota, T., Segawa, Y., and Koinuma, H. (2003), Appl. Phys. Lett. 82, 532.
47. Komuro, S., Katsumata, T., Morikawa, T., Zhao, X., Isshiki, H., and Aoyagi, Y. (1999), Appl. Phys. Lett. 74, 377.
48. Komuro, S., Katsumata, T., Morikawa, T., Zhao, X., Isshiki, H., and Aoyagi, Y. (2000a), J. Appl. Phys. 88, 7129.
49. Komuro, S., Katsumata, T., Morikawa, T., Zhao, X., Isshiki, H., and Aoyagi, Y. (2000b), Appl. Phys. Lett. 76, 3935.
50. Kwok, H. S., Kim, H. S., Kim, D. H., Shen, W. P., Sun, X.W., and Xiao, R. F. (1997), Appl. Surf. Sci. 109/110, 595.
51. Lettieri, S., and Maddalena, P. (2002), J. Appl. Phys. 91, 5564.
52. Lowndes, D. H., Rouleau, C. M., Thundat, T. G., Duscher, G., Kenik, E. A., and Pennycook, S. J. (1999), J. Mater. Res. 14, 359.
53. Lu, Y. F., Ni, H. Q., Mai, Z. H., and Ren, Z. M. (2000), J. Appl. Phys. 88, 498.
54. Mais, N., Reithmaier, J. P., Forchel, A., Kohls, M., Spanhel, L., and Müller, G. (1999), Appl. Phys. Lett. 75, 2005.
55. Makino, T., Chia, C. H., Tuan, N. T., Segawa, Y., Kawasaki, M., Ohtomo, A., Tamura, K., and Koinuma, H. (2000a), Appl. Phys. Lett. 76, 3549.
56. Makino, T., Tuan, N. T., Segawa, Y., Chia, C. H., Ohtomo, A., Kawasaki, M., and Koinuma, H. (2000b), J. Lumin. 87/89, 210.
57. Makino, T., Tamura, K., Chia, C. H., Segawa, Y., Kawasaki, M., Ohtomo, A., and Koinuma, H. (2002), J. Appl. Phys. 92, 7157.
58. Masuda, S., Kitamura, K., Okumora, Y., Miyatake, S., Tabata, H., and Kawai, T. (2003), J. Appl. Phys. 93, 1624.
59. Meng, L. J., Moreira, de Sa C. P., and Santos, M. P. (1994), Appl. Surf. Sci. 78, 57.
60. Millon, E., Albert, O., Loulergue, J. C., Etchepare, J., Hulin, D., Seiler, W., and Perrière, J. (2000), J. Appl. Phys. 88, 6937.
61. Mitra, A., and Thareja, R. K. (2001), J. Appl. Phys. 89, 2025.
62. Mitra, A., Thareja, R. K., Ganesan, V., Gupta, A., Sahoo, P. K., and Kulkarni, V. N. (2001), Appl. Surf. Sci. 174, 232.
63. Muth, J. F., Kolbas, R. M., Sharma, A. K., Oktyabrsky, S., and Narayan, J. (1999), J. Appl. Phys. 85, 7884.
64. Nakamura, T., Yamada, Y., Kusumori, T., Minoura, H., and Muto, H. (2002), Thin Solid Films 411, 60.
65. Nakayama, T. (1983), Surf. Sci. 133, 101.
66. Nakayama, T., Itoh, N., Kawai, T., Hashimoto, K., and Sakata, T. (1982), Rad. Effects Lett. 67, 129.
67. Narayan, J., Dovidenko, K., Sharma, A. K., and Oktyabrsky, S. (1998), J. Appl. Phys. 84, 2597.
68. Nichols, W. T., Keto, J.W., Henneke, D. E., Brock, J. R., Malyavanatham, G., Becker, M. F., and Glicksman, H. D. (2001), Appl. Phys. Lett. 78, 1128.
69. Ohta, H., Tanji, H., Orita, M., Hosono, H., and Kawazoe, H. (1999), Epitaxial Growth Principles and Applications, MRS Symposium, Warrendale, PA, p. 309.
70. Ohta, H., Kawamura, K., Orita, M., Hirano, M., Sarakura, N., and Osono, H. (2000), Appl. Phys. Lett. 77, 475.
71. Ohtomo, A., Kawasaki, M., Sakurai, Y., Yoshida, Y., Koinuma, H., Yu, P., Tang, Z. K., Wong, G. K. L., and Segawa, Y. (1998a), Mater. Sci. Eng. B 54, 24.
72. Ohtomo, A., Kawasaki, M., Koida, T., Masubuchi, K., Koinuma, H., Sakurai, Y., Yoshida, Y., Yasuda, T., and Segawa, Y. (1998b), Appl. Phys. Lett. 72, 2466.
73. Ohtomo, A., Tamura, K., Saikusa, K., Takahashi, T., Makino, T., Segawa, Y., Koinuma, H., and Kawasaki, M. (1999a), Appl. Phys. Lett. 75, 2635.
74. Ohtomo, A., Kawasaki, M., Ohkubo, I., Koinuma, H., Yasuda, T., and Segawa, Y. (1999b), Appl. Phys. Lett. 75, 980.
75. Ohtomo, A., Tamura, K., Kawasaki, M., Makino, T., Segawa, Y., Tang, Z. K., Wong, G. K. L., Matsumoto, Y., and Koinuma, H. (2000), Appl. Phys. Lett. 77, 2204.
76. Okoshi, M., Higashikawa, K., and Hanabusa, M. (2000), Appl. Surf. Sci. 154/155, 424.
77. Ong, H. C., Dai, J. Y., Hung, K. C., Chan, Y. C., Chang, R. P. H., and Ho, S. T. (2000), Appl. Phys. Lett. 77, 1484.
78. Ong, H. C., Li, A. S. K., and Du, G. T. (2001), Appl. Phys. Lett. 78, 2667.
79. Ong, H. C., Zhu, A. X. E., and Du, G. T. (2002), Appl. Phys. Lett. 80, 941.
80. Pearton, S. J., Abernathy, C. B., Overberg, M. E., Thaler, G. T., Norton, D. P., Theodoropoulou, N., Hebard, A. F., Park, Y. D., Ren, F., Kim, J., and Boatner, L. A. (2003), J. Appl. Phys. 93, 1.
81. Perrière, J., Millon, E., Chamarro, M., Morcrette, M., and Andreazza, C. (2001), Appl. Phys. Lett. 78, 2949.
82. Perrière, J., Millon, E., Seiler, W., Boulmer-Leborgne, C., Craciun, V., Albert, O., Loulergue, J. C., and Etchepare, J. (2002), J. Appl. Phys. 91, 690.
83. Pons, Y., and Moll, O. (2003), Ph.D. Thesis, Universités Paris, Paris, France, October.
84. Prellier, W., Fouchet, A., Mercey, B., Simon, Ch., and Raveau, B. (2003), Appl. Phys. Lett. 82, 3490.
85. Puchert, M. H., Timbrell, P. Y., and Lamb, R. N. (1996), J. Vac. Sci. Technol. A14, 2220.
86. Ramamoorthy, K., Sanjeeviraja, C., Jayachandran, M., Sankaranarayanan, K., and Bhattacharya, P. (2001), J. Crystal Growth 226, 281.
87. Ryu, Y. R., Zhu, S., Look, D. C., Wrobel, J. M., Jeong, H. M., and White, H. W. (2000a), J. Crystal Growth 216, 326.
88. Ryu, Y. R., Zhu, S., Budai, J. D., Chandrasekhar, H. R., Micelli, P. F., and White, H. W. (2000b), J. Appl. Phys. 88, 201.
89. Ryu, Y. R., Zhu, S., Look, D. C., Wrobel, J. M., Jeong, H. M., and White, H. W. (2000c), J. Crystal Growth 216, 330.
90. Saeki, H., Tabata, H., and Kawai, T. (2001), Solid State Commun. 120, 439.
91. Sankur, H., and Cheung, J. T. (1983), J. Vac. Sci. Technol. A1, 1806.
92. Sharma, A. K., Muth, J. F., Teng, C. W., Jin, C., Kvit, A., Kolbas, R. M., and Holland, O. W. (1999), Appl. Phys. Lett. 75, 3327.
93. Shi, W., Chen, Z., Zhao, T., Lu, H., Zhou, Y., and Yang, G. (2000), J. Am Opt. Soc. B17, 235.
94. Shim, E. U., Kang, H. S., Kang, J. S., Kim, J. H., and Lee, S. Y. (2002), Appl. Surf. Sci. 186, 474.
95. Sugiura, M., Nakashima, Y., Nakasaka, T., and Kobayashi, T. (2002), Appl. Surf. Sci. 197/198, 472.
96. Sumya, M., Fuke, S., Tsukazaki, A., Tamura, K., Ohtomo, A., Kawasaki, M., and Koinuma, H. (2003), J. Appl. Phys. 93, 2562.
97. Sun, X. W., and Kwok, H. S. (1999), J. Appl. Phys. 86, 408.
98. Sun, C. J., Kung, P., Saxler, A., Ohsato, H., Haritos, K., and Razeghi, M. (1994), J. Appl. Phys. 75, 3964.
99. Sun, X. W., Xiao, R. F., and Kwok, H. S. (1998), J. Appl. Phys. 84, 5776.
100. Sun, H. D., Makino, T., Tuan, N. T., Segawa, Y., Tang, Z. K., Wong, G. K. L., Kawasaki, M., Ohtomo, A., Tamura, K., and Koinuma, H. (2000), Appl. Phys. Lett. 77, 4250.
101. Suzuki, A., Matsushita, T., Wada, N., Sakamoto, Y., and Okuda, N. (1996), Jpn. J. Appl. Phys. 35, L56.
102. Tabata, H., Saeki, M., Guo, S. L., Choi, J. H, and Kawai, T. (2001), Physica B 308-310, 993.
103. Tasker, P .W. (1979), J. Phys. C: Solid State Phys. 12, 4977.
104. Teng, C. W., Muth, J. F., Özgür, U., Bergmann, M. J., Everitt, H. O., Sharma, A. K., Jin, C., and Narayan, J. (2000a), Appl. Phys. Lett. 76, 979.
105. Teng, C. W., Muth, J. F., Kolbas, R. M., Hassan, K. M., Sharma, A. K., Kvit, A., and Narayan, J. (2000b), Appl. Phys. Lett. 76, 43.
106. Tiwari, A., Park, M., Jin, C., Wang, H., Kumar, D., and Narayan, J. (2002a), J. Mater. Res. 17, 2480.
107. Tiwari, A., Jin, C., Kvit, A., Kumar, D., Muth, J. F., and Narayan, J. (2002b), Solid State Commun. 121, 371.
108. Tsukazaki, A., Saito, H., Tamura, K., Ohtani, M., Koinuma, H., Sumya, M., Fuke, S., Fukumura, T., and Kawasaki, M. (2002), Appl. Phys. Lett. 81, 235.
109. Ueda, T., Huang, T. F., Spruytte, S., Lee, H., Yuri, M., Itoh, K., Baba, T., and Harris, J. S. (1998), J. Crystal Growth 187, 340.
110. Ueda, K., Tabata, H., and Kawai, T. (2001), Appl. Phys. Lett. 79, 988.
111. Vasco, E., Rubio-Zuazo, J., Vasquez, L., Prieto, C., and Zaldo, C. (2001), J. Vac. Sci. Technol. B19, 224.
112. Vispute, R.D., Talyansky, V., Trajanovic, Z., Choopun, S., Downes, M., Sharma, R. P., Venkatesan, T., Woods, M.C., Lareau, R. T., Jones K. A., and Lliadis, A. A. (1997), Appl. Phys. Lett. 70, 2735.
113. Vispute, R. D., Talyansky, V., Choopun, S., Sharma, R.P., Venkatesan, T., He, M., Tang, X., Halpern, J.B., Spencer, M. G., Li, Y. X., Salamanca-Riba, L. G., Lliadis, A. A., and Jones, K. A. (1998), Appl. Phys. Lett. 73, 348.
114. Wakano, T., Fujimora, N., Morinaga, Y., Abe, N., Ashida, A., and Ito, T. (2001), Physica E 10, 260.
115. Wang, G., Kiehne, G. T., Wong, G. K. L., Ketterson, J. B., Liu, X., and Chang, R. P. H. (2002a), Appl. Phys. Lett. 80, 401.
116. Wang, R. P., Muto, H., Yamada, Y., and Kusumori, T. (2002b), Thin Solid Films 411, 69.
117. Washington, P. L., Ong, H. C., Dai, J. Y., and Chang, R. P. H. (1998), Appl. Phys. Lett. 72, 3261.
118. Wei, J., Zhang, B., Yao, N., Wang, X., Ma, H., and Wang, S. (2001), J. Vac. Sci. Technol. B19, 1082.
119. Wraback, M., Shen, H., Liang, S., Gorla, C. R., and Lu, Y. (1999), Appl. Phys. Lett. 74, 507.
120. Xiao, R. F., Liao, H. B., Cue, N., Sun, X. W., and Kwok, H. S. (1996), J. Appl. Phys. 80, 4226.
121. Yamamoto, T., and Yoshida, H. K. (1999), Jpn. J. Appl. Phys. 38, L166.
122. Yang, W., Vispute, R. D., Choopun, S., Sharma, R. P., Venkatesan, T., and Shen, H. (2001), Appl. Phys. Lett. 78, 2787.
123. Yang, W., Hullavarad, S. S., Nagaraj, B., Takeushi, I., Sharma, R. P., Venkatesan, T., Vispute, R. D., and Shen, H. (2003), Appl. Phys. Lett. 82, 3424.
124. Yin, J., Liu, Z. G., Liu, H., Wang, X. S., Zhu, T., and Liu, J. M. (2000), J. Crystal Growth 220, 281.
125. Zeng, J. N., Low, J. K., Ren, Z. M., Liew, T., and Lu, Y. F. (2002), Appl. Surf. Sci. 197/198, 362.
126. Zhang, W., Wang, H., Wong, K. S., Tang, Z. K., Wong, G. K. L., and Ravinder, J. (1999), Appl. Phys. Lett. 75, 3321.