X-ray photoelectron spectroscopy and auger electron spectroscopy studies of Al-doped ZnO films

Applied Surface Science

Volumn 158, Issue 1, 2000, Pages 134-140

  Chen, M ^a   Wang, X ^a   Yu, Y H ^a   Pei, Z L ^b   Bai, X D ^b   Sun, C ^b   Huang, R F ^b   Wen, L S ^b  

^a SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY   (China)

^b INSTITUTE OF METAL RESEARCH   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM; AUGER ELECTRON SPECTROSCOPY; DOPING (ADDITIVES); OXYGEN; THIN FILMS; X RAY PHOTOELECTRON SPECTROSCOPY;

DEPTH PROFILE; TRANSITION ZONE; ZINC OXIDE FILM;

ZINC OXIDE;

EID: 0033726952     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(99)00601-7     Document Type: Article

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