Effect of deposition conditions on optical and electrical properties of ZnO films prepared by pulsed laser deposition

Applied Surface Science

Volumn 197-198, Issue , 2002, Pages 362-367

  Zeng, Ji Nan ^a   Low, Juay Kiang ^a   Ren, Zhong Min ^a   Liew, Thomas ^a   Lu, Yong Feng ^a  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

Pulsed laser deposition; Raman spectroscopy; Sheet resistivity; Transmittance spectra; X ray diffraction; Zinc oxide

Indexed keywords

CRYSTALLINE MATERIALS; PULSED LASER DEPOSITION; RAMAN SPECTROSCOPY; SPECTRUM ANALYSIS; X RAY DIFFRACTION; ZINC OXIDE;

TRANSMITTANCE SPECTRA;

SURFACE PROPERTIES;

EID: 0141861712     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(02)00425-7     Document Type: Conference Paper

References (15)

1. Koch M.H., Timbrell P.Y., Lamb R.N. Semicond. Sci. Technol. 10 1995 1523.
2. Vanheusden K., Seager C.H., Wareen W.L., Tallant D.R., Caruso J., Hampden-Smith M.J., Kodas T.T. J. Lumin. 75 1997 11.
3. Tang Z.K., Yu P., Wong G.L., Kawasaki M., Ohtomo A., Koinuma H., Segawa Y. Solid State Commun. 103 1997 459.
4. Veradi P., Nastase N., Gherasim C., Ghica C., Dinescu M., Dinu R., Flueraru C. J. Cryst. Growth 197 1999 523.
5. Gardeniers J.G.E., Rittersma Z.M., Burger G.J. J. Appl. Phys. 83 1998 7844.
6. Paraguay F.D., Miki-Yoshida M., Morales J., Solis J., Estrada W.L. Thin Solid Films 373 2000 137.
7. Exarhos G.J., Rose A., Wang L.Q., Windisch C.F. Jr. J. Vac. Sci. Technol. A 16 1997 1926.
8. Dutta S., Jackson H.E., Boyd J.T., Hickernell F.S., Davis R.L. Appl. Phys. Lett. 39 3 1981 206.
9. Hu W.S., Liu Z.G., Sun J., Guo X.L., Yang Z.J., Shi L.J., Feng D. Mater. Sci. Eng. B 40 1996 165.
10. Gorla C.R., Emanetoglu N.W., Liang S., Mayo W.E., Lu Y., Wraback M., Shen H. J. Appl. Phys. 85 1999 2595.
11. Lokhande B.J., Uplane M.D. Appl. Surf. Sci. 167 2000 243.
12. Wu H.Z., He K.M., Qiu D.J., Huang D.M. J. Cryst. Growth 217 2000 131.
13. Mitra S.S., Brafman O., Daniels W.B., Crawford R.K. Phys. Rev. 186 3 1969 942.
14. Tansley T.L., Neely D.F. Thin Solid Films 121 1987 95.
15. Tzolov M., Tzenov N., Dimova-Malinovska D., Kalitzova M., Pizzuto C., Vitali G., Zollo G., Ivanov I. Thin Solid Films 379 2000 28.