Postdeposition annealing of radio frequency magnetron sputtered ZnO films

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 14, Issue 4, 1996, Pages 2220-2230

  Puchert, M K ^a   Timbrell, P Y ^a   Lamb, R N ^a  

^a UNIVERSITY OF NEW SOUTH WALES   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0030501205     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.580050     Document Type: Article

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