SCOPUS 정보 검색 플랫폼

Applied Physics A: Materials Science and Processing

Volumn 71, Issue 6, 2000, Pages 619-625

Influence of the growth conditions on the composition of Al nitride films by laser ablation

(6) Basillais, A a Boulmer Leborgne, C a Mathias, J a Laidani, N b Laurent, A c Perriere J c

a UNIVERSITÉ D'ORLÉANS (France)

b FONDAZIONE BRUNO KESSLER (Italy)

c INSTITUT DES NANOSCIENCES DE PARIS (France)

Author keywords

[No Author keywords available]

Indexed keywords

CONTAMINATION; DISSOCIATION; FILM GROWTH; LASER ABLATION; NITRIDES; NITROGEN; OXYGEN; PRESSURE EFFECTS; RUTHERFORD BACKSCATTERING SPECTROSCOPY; THIN FILMS; X RAY DIFFRACTION ANALYSIS; X RAY PHOTOELECTRON SPECTROSCOPY;

ALUMINUM NITRIDE; LASER ENERGY DENSITY; NUCLEAR REACTION ANALYSIS;

ALUMINUM COMPOUNDS;

EID: 0034501862 PISSN: 09478396 EISSN: None Source Type: Journal
DOI: 10.1007/s003390000571 Document Type: Article

Times cited : (11)

References (24)

1
- 0001771963
- K.L. Saenger: Processing Adv. Mater. 2, 1 (1993)
- (1993) Processing Adv. Mater. , vol.2 , pp. 1
- Saenger, K.L.¹

2
- 0343538926
- D.B. Chrisey, A. Inam: MRS Bull. 17, 37 (1992)
- (1992) MRS Bull. , vol.17 , pp. 37
- Chrisey, D.B.¹ Inam, A.²

3
- 0029307142
- R.D. Vispute, J. Narayan, H. Wu, K. Jagannadham: J. Appl. Phys. 77, 4724 (1995)
- (1995) J. Appl. Phys. , vol.77 , pp. 4724
- Vispute, R.D.¹ Narayan, J.² Wu, H.³ Jagannadham, K.⁴

4
- 0031546402
- D. Feiler, R.S. Williams, A.A. Talin, H. Yoon, M.S. Goorsky: J. Cryst. Growth 171, 12 (1997)
- (1997) J. Cryst. Growth , vol.171 , pp. 12
- Feiler, D.¹ Williams, R.S.² Talin, A.A.³ Yoon, H.⁴ Goorsky, M.S.⁵

5
- 0004765073
- T. Ogawa, M. Okamoto, Y.Y. Khin, Y. Mori, A. Hatta, T. Ito, T. Sasaki, A. Hiraki: Diamond Relat. Mater. 6, 1015 (1998)
- (1998) Diamond Relat. Mater. , vol.6 , pp. 1015
- Ogawa, T.¹ Okamoto, M.² Khin, Y.Y.³ Mori, Y.⁴ Hatta, A.⁵ Ito, T.⁶ Sasaki, T.⁷ Hiraki, A.⁸

6
- 0032073102
- G.S. Sudhir, H. Fujii, W.S. Wong, C. Kisieslowski, N. Newman, C. Dicker, Z. Liliental-Weber, M.D. Rubin, E.R. Weber: Appl. Surf. Sci. 127-129, 471 (1998)
- (1998) Appl. Surf. Sci. , vol.127-129 , pp. 471
- Sudhir, G.S.¹ Fujii, H.² Wong, W.S.³ Kisieslowski, C.⁴ Newman, N.⁵ Dicker, C.⁶ Liliental-Weber, Z.⁷ Rubin, M.D.⁸ Weber, E.R.⁹

7
- 0032330539
- M. He, N. Cheng, P. Zhou, H. Okabe, J.B. Halpern: J. Vac. Sci. Technol. A 16, 2372 (1998)
- (1998) J. Vac. Sci. Technol. A , vol.16 , pp. 2372
- He, M.¹ Cheng, N.² Zhou, P.³ Okabe, H.⁴ Halpern, J.B.⁵

8
- 0022075813
- L.R. Doolittle: Nucl. Instrum. Methods B 9, 344 (1985)
- (1985) Nucl. Instrum. Methods B , vol.9 , pp. 344
- Doolittle, L.R.¹

9
- 30244449630
- G. Amsel, J.P. Nadai, E. d'Artemare, D. David, E. Girard, J. Moulin: Nucl. Instrum. Methods 92, 481 (1971)
- (1971) Nucl. Instrum. Methods , vol.92 , pp. 481
- Amsel, G.¹ Nadai, J.P.² D'Artemare, E.³ David, D.⁴ Girard, E.⁵ Moulin, J.⁶

10
- 0003766698
- L. Baixia, L. Yinkui, L. Yi: J. Mater. Chem. 3, 117 (1993)
- (1993) J. Mater. Chem. , vol.3 , pp. 117
- Baixia, L.¹ Yinkui, L.² Yi, L.³

11
- 0342589839
- M. Costantino, C. Firpo: J. Mater. Res. 6, 11 (1991)
- (1991) J. Mater. Res. , vol.6 , pp. 11
- Costantino, M.¹ Firpo, C.²

12
- 0000303647
- J. Hermann, C. Boulmer-Leborgne, D. Hong: J. Appl. Phys. 83, 691 (1998)
- (1998) J. Appl. Phys. , vol.83 , pp. 691
- Hermann, J.¹ Boulmer-Leborgne, C.² D, H.³

13
- 0031176740
- B.M. Penetrante, J.N. Bardsley, M.C. Hsiao: Jpn. J. Appl. Phys. 36, 5007 (1997)
- (1997) Jpn. J. Appl. Phys. , vol.36 , pp. 5007
- Penetrante, B.M.¹ Bardsley, J.N.² Hsiao, M.C.³

14
- 0345633693
- I.P. Vinogradov: Plasma Sources Sci. Technol. 8, 299 (1999)
- (1999) Plasma Sources Sci. Technol. , vol.8 , pp. 299
- Vinogradov, I.P.¹

15
- 0030216286
- R. Gomez-San Roman, R. Pérez Casero, C. Maréchal, J.P. Enard, J. Perrière: J. Appl. Phys. 80, 1787 (1996)
- (1996) J. Appl. Phys. , vol.80 , pp. 1787
- Gomez-San Roman, R.¹ Pérez Casero, R.² Maréchal, C.³ Enard, J.P.⁴ Perrière, J.⁵

16
- 0031998104
- C. Boulmer-Leborgne, A.L. Thomann, P. Andreazza, C. Andreazza-Vignolle, J. Hermann, V. Craciun, P. Echegut, D. Craciun: Appl. Surf. Sci. 125, 137 (1998)
- (1998) Appl. Surf. Sci. , vol.125 , pp. 137
- Boulmer-Leborgne, C.¹ Thomann, A.L.² Andreazza, P.³ Andreazza-Vignolle, C.⁴ Hermann, J.⁵ Craciun, V.⁶ Echegut, P.⁷ Craciun, D.⁸

17
- 0029203891
- S. Cao, A.J. Pedraza, L.F. Allard: J. Mater. Res. 10, 54 (1995)
- (1995) J. Mater. Res. , vol.10 , pp. 54
- Cao, S.¹ Pedraza, A.J.² Allard, L.F.³

18
- 0021444393
- C. Carlone, K.M. Larkin, H.R. Shanks: J. Appl. Phys. 55, 4010 (1984)
- (1984) J. Appl. Phys. , vol.55 , pp. 4010
- Carlone, C.¹ Larkin, K.M.² Shanks, H.R.³

19
- 0028462208
- S. Simson, N. Heide, J.W. Schultze: Surf. Interface Anal. 22, 431 (1994)
- (1994) Surf. Interface Anal. , vol.22 , pp. 431
- Simson, S.¹ Heide, N.² Schultze, J.W.³

20
- 0027680465
- P. Marcus, C. Hinnen, I. Olefjord: Surf. Interface Anal. 20, 923 (1993)
- (1993) Surf. Interface Anal. , vol.20 , pp. 923
- Marcus, P.¹ Hinnen, C.² Olefjord, I.³

21
- 84955039632
- P. Prieto, R.E. Kirby: J. Vac. Sci. Technol. A 13, 2819 (1995)
- (1995) J. Vac. Sci. Technol. A , vol.13 , pp. 2819
- Prieto, P.¹ Kirby, R.E.²

22
- 0032384613
- J. Onoe, K. Takenchi, K. Ohno, Y. Kawazoe: J. Vac. Sci. Technol., A 16, 385 (1998)
- (1998) J. Vac. Sci. Technol., A , vol.16 , pp. 385
- Onoe, J.¹ Takenchi, K.² Ohno, K.³ Kawazoe, Y.⁴

23
- 0001041825
- J.M. Schneider, A. Anders, B. Hjörvarsson, I. Petrov, K. Macak, U. Helmersson, J.E. Sundgren: Appl. Phys. Lett. 74, 200 (1999)
- (1999) Appl. Phys. Lett. , vol.74 , pp. 200
- Schneider, J.M.¹ Anders, A.² Hjörvarsson, B.³ Petrov, I.⁴ Macak, K.⁵ Helmersson, U.⁶ Sundgren, J.E.⁷

24
- 0031131274
- R.D. Vispute, J. Narayan, J.D. Budai: Thin Solid Films 299, 94 (1996)
- (1996) Thin Solid Films , vol.299 , pp. 94
- Vispute, R.D.¹ Narayan, J.² Budai, J.D.³

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.