Extended defects created by light ion implantation in germanium

ECS Transactions

Volumn 16, Issue 6, 2009, Pages 163-175

  David, M L ^a   Barbot, J F ^a   Rousselet, S ^a   Pailloux, F ^a   Babonneau, D ^a   Beaufort, M F ^a   Pizzagalli, L ^a   Drouet, M ^a   Simoen, E ^b   Claeys, C ^b,c  

^a UNIVERSITÉ DE POITIERS   (France)

^b IMEC   (Belgium)

^c UNIVERSITY OF LEUVEN   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

GERMANIUM; HIGH RESOLUTION TRANSMISSION ELECTRON MICROSCOPY; ION IMPLANTATION; MICROCRACKS; X RAY SCATTERING;

CAVITY LAYERS; ENERGY RANGES; EXTENDED DEFECT; GRAZING INCIDENCE SMALL-ANGLE X-RAY SCATTERING; IMPLANTATION TEMPERATURE; KINETIC EFFECT; LIGHT ION IMPLANTATION; PLASMA-BASED ION IMPLANTATION;

GERMANIUM METALLOGRAPHY;

EID: 63849147140     PISSN: 19385862     EISSN: 19386737     Source Type: Conference Proceeding    
DOI: 10.1149/1.2980301     Document Type: Conference Paper

References (70)

1. M. Bruel, Electronics Lett. 31, 1201 (1995)
2. I. Radu, I. Szafraniak, R. Scholz, M. Alexe and U. Goesele, J. Appl. Phys., 94, 7820 (2003)
3. Tauzin, A. Akatsu, T. Rabarot, M. Dechamp, J. Zussy, M. Moriceau, H. Michaud, J.F. Charvet, A.M. Di Cioccio, L. Foumel, F. Garrione, J. Faure, B. Letertre and F. Kernevez, Electronics Lett., 41, 668 (2005)
4. Q.Y. Tong, K. Gutjahr, S. Hopfe, U. Gösele and T.H. Lee, Appl. Phys. Lett., 70, 1390 (1997)
5. C. Deguet, L. Sanchez, T. Akatsu, F. Allibert, J. Dechamp, F. Madeira, F. Mazen, A. Tauzin, V. Loup, C. Richtarch, D. Mercier, T. Signamarcheix, F. Letertre, B. Depuydt and N. Kernevez, Electronics Lett., 42, 415 (2006)
6. B. Terreault, Phys. Stat. Sol. (a), 204, 2129 (2007)
7. W. Chen, P. Chen, J.E. Pulsifer, T.L. Alford, T.F. Kuech and S.S. Lau, Appl. Phys. Lett., 92, 212109 (2008)
8. D. Alquier, C. Bongiorno, F. Roccaforte and V. Raineri, Appl. Phys. Lett., 86, 21191 (2005)
9. B Hollander, S.T. Lenk, S. Mantl, H. Trinkaus, D. Kirch, M. Luysberg, T. Hakbarth, H.J. Herzog, and P.F.P. Fichtner, Nucl. Instrum. Methods Phys. Res. B, 175-177, 357 (2001)
10. S.M. Myers, G.A. Petersen, D.M. Follstaedt, T.J. Headley, J.R. Michael and C.H. Seager, Nucl. Inst. Methods Phys. Res. B, 120, 43 (1996)
11. G.A. Petersen, S.M. Myers and D.M. Follstaedt, Nucl. Inst. Methods Phys. Res. B 127/128, 301(1997)
12. S.M. Myers and D.M. Follstaedt, J. Appl. Phys., 86, 3048 (1999)
13. A. Kinomura, Y. Horino, Y. Nakano and J.S. Williams, J. Appl. Phys., 98, 066102 (2005)
14. V. Rainen, M. Saggio and E. Rimini, J. Mater. Res., 15, 1449 (2000)
15. S. Personnic, K.K. Bourdelle, F. Letertre, A. Tauzin, N. Cherkashin, A. Cl averie, F. Fortunier and H. Klocker, J. Appl. Phys., 103, 023508 (2008)
16. M. Nastasi, T. Höchbauer, J-K Lee, A. Misra, J.P. Hirth, M. Ridgway and T. Lafford, Appl. Phys. Lett. 86, 154102 (2005)
17. Z. Di, Y. Wang, M. Nastasi, F. Rossi, J.K. Lee, L. Shao and P.E. Thompson, Appl. Phys. Lett., 91, 244101 (2007)
18. S. Reboh, M.F. Beaufort, J.F. Barbot, J. Grihlé and P.F.P. Fichtner, Appl. Phys. Lett., 93, 022106 (2008)
19. M.K. Weldon, V.E. Marsico, Y.J. Chabal, A. Agarwal, D.J. Eaglesham, J. Sapjeta, W.L. Brown, D.C. Jacobson, Y. Caudano, S.B. Christman and E.E. Chaban, J. Vac. Sci. Technol. B, 15, 1065 (1997)
20. F.A. Reboredo, M. Ferconi and S.T. Pantelides, Phys. Rev. Lett., 82, 4870 (1999)
21. S.B Zhang and W.B. Jackson, Phys. Rev. B, 43, 12142 (1991)
22. Yong-sung Kim and K.J. Chang, Phys. Rev. Lett. 86, 1773 (2001)
23. S. Muto, S. Takeda and M. Hirata, Phil. Mag. A, 72, 1057 (1995)
24. N. Martsinovich, M.I. Heggie and C.P. Ewels, J. Phys.: Condens. Matter 15, S2815 (2003)
25. N. Martsinovich, I.S. Martinez and M.I. Heggie, Phys. Stat. Sol. 6, 1771 (2005)
26. S. Hayashi, D. Bruno and S. Goorsky, Appl. Phys. Lett., 85, 236 (2004)
27. P. Chen, Z. Di, M. Nastasi, E. Bruno, M.G. Grimaldi, N.D. Theodore and S.S. Lau, Appl. Phys. Lett., 92, 202107 (2008)
28. M.L. David, M.F. Beaufort and J.F. Barbot, J. Appl. Phys., 93, 1438 (2003)
29. M.L. David, M.F, Beaufort and J.F. Barbot, Nucl. Inst. Methods Phys. Res. B, 226, 531 (2004)
30. D. Babonneau, M.F. Beaufort, A. Declémy, J.F. Barbo« and J.P. Simon, J. Appl. Phys. 99, 113507 (2006)
31. M.L. David, F. Pailloux, D. Babonneau, M. Drouet, J.F. Barbot, E. Simoen and C. Claeys, J. Appl. Phys., 102, 096101 (2007)
32. A. Giguère and B. Terreault, J. Appl. Phys. 102, 106106 (2007)
33. N. Desrosiers, A. Giguère, B. Terreault, M. Chicoine and F. Schiettekatte, Nucl. Inst. Methods Phys. Res. B, 266, 1971 (2008)
34. E. Oliviero, M.L. David, M.F. Beaufort, J. Nomgaudyte, L. Pranevicius, A. Declémy and J.F. Barbot, J. Appl. Phys., 91, 1179 (2002)
35. E. Oliviero, C. Tramas, F. Pailloux, A. Declemy, M.F. Beaufort, C. Blanchard and J.F. Barbot, Mater. Sci. and Eng. B, 102, 289 (2003)
36. C Claeys and E. Simoen, Germanium-Based Technologies: From materials to devices, Elsevier (2007)
37. T. Akatsu, K.K. Bourdelle, C. Richtarch, B. Faure and F. Letertre, Appl. Phys. Lett., 86, 181910 (2005)
38. M. Hiller, E.V. Lavrov and J. Weber, Phys. Rev. B, 71, 045208 (2005)
39. D.M. Follstaedt, S.M. Myers and S.R. Lee, Appl. Phys. Lett. 69, 2059 (1996)
40. S.M. Myers, H.J. Stein and D.M. Follstaedt, Phys. Rev. B 51, 9742 (1995)
41. X. Lu, S. Sundar Kumar Iyer, C. Hu and N. W. Cheung, Appl. Phys. Lett., 71, 2767 (1997)
42. D. Babonneau, S. Peripolli, M.F. Beaufort, J.F. Barbot and J.-P. Simon, J. Appl. Cryst., 40, s350 (2007)
43. J.F. Ziegler and J.B. Biersack, http://www.srim.org
44. M.L. David, F. Pailloux, M. Drouet, M.F. Beaufort, J.F. Barbot, E. Simoen, C. Claeys, Sol. Stat. Phenom., 131-133, 103 (2008)
45. M.K. Weldon, V.E. Marsico, Y.J. Chabal, A. Agarwal, D.J. Eaglesham, J. Sapjeta, W.L. Brown, D.C. Jacobson, Y. Caudano, S.B. Christman and E.E. Chaban, J. Vac Sci. Technol. B, 15, 1065 (1997)
46. J.K. Lee, Y. Lin, Q.X. Jia, T. Höchbauer, H.S. Jung, L. Shao, A. Misra and M. Nastasi, Appl. Phys. Lett., 89, 101901 (2006)
47. N.M. Johnson, F.A. Ponce, R.A. Street and R.J. Nemanich, Phys. Rev. B, 35, 4166 (1987)
48. Z. Di, Y. Wang, M. Nastasi, F. Rossi, J.K. Lee, L. Shao and P.E. Thompson, Appl. Phys. Lett., 91, 244101 (2007)
49. S. Reboh, M.F. Beaufort, J.F. Barbot, J. Grihlé and P.F.P. Fichtner, to be published in Appl. Phys. Lett.
50. J. Lauwaert, M.L. David, M.F. Beaufort, E. Simoen, D. Deplaand P. Clauws,Mat. Sc. Semicond Proc., 9, 571 (2006)
51. S.K. Estreicherand D. M. Maric,Phys. Rev. Lett., 70, 3963 (1993)
52. Oliviero, M.F. Beaufort and J.F. Barbot, J. Appl. Phys. 89, 5332 (2001)
53. P.F.P. Fichtner, J.R. Kaschny, M. Behar, R.A. Yankov, A. Mücklich and W. Skorupa, Nucl. Inst. Meth. Phys. Res. B 148,329 (1999)
54. C.C. Griffioen, J.H. Evans, P.C. De Jong and A. van Veen, Nucl. Instrum. Methods Phys. Res. B, 27, 417 (1987)
55. C. Macchi, S. Mariazzi, G.P. Karwasz, R.S. Brusa, P. Folegati, S. Frabboni and G. Ottaviani, Phys. Rev. B, 74, 174120 (2006)
56. J. Grisolia, F. Cristiano, G. Ben Assayag and A. Claverie, Nucl. Inst. Meth. Phys. Res. B, 178, 160 (2001)
57. S.M. Myers, H.J. Stein and D.M. Follstaedt, Phys. Rev. B, 51, 9742 (1995)
58. S.M. Myers, D.M. Follstaedt, H.J. Stein and W.R. Wampler, Phys. Rev. B, 47, 13380 (1993)
59. J. Vanhellemont and E. Simoen, Electrochem. Soc. Trans., 3, 451 (2006)
60. J.M. Zahler, A. Fontcuberta I. Morral, M.J. Griggs, Harry A. Atwater and Y.J. Chabal, Phys. Rev. B, 75, 035309 (2007)
61. A. Giguère and B. Terreault, Surf. Coat. Tech., 201, 8205 (2007)
62. C.A. Ferreira Lima and A. Howie, Phil. Mag., 34, 1057 (1976)
63. S. Takeda, M. Kohyama and K. Ibe, Phil. Mag. A, 2, 287 (1994)
64. D.L. da Silva, P.F.P. Fichtner, A. Peeva, M. Behar, R. Koegler and W. Skorupa, Nucl. Inst. Methods Phys. Res. B, 175-177, 335 (2001)
65. M. Kohyama and S. Takeda, Phys. Rev B, 51, 13111 (1995)
66. S. Rousselet, M.L. David, M.F. Beaufort, J.F. Barbot, A. Declémy, E. Simoen and C. Claeys, to be published.
67. J. Vanhellemont and E. Simoen, J. Electrochem. Soc. 154, H572 (2007)
68. E. Simoen, G. Brouwers, A. Sarta, M.-L. David, F. Pailloux, B. Parmentier, T. Clarysse, J. Goossens, W. Vandervorst and M. Meuris, submitted to Mat. Sc. Process.
69. D.P. Hickey, Z.L. Bryan, K.S. Jones, R.G. Elliman and E.E. Haller, J. Vac. Sci. Technol. B 26, 425 (2008)
70. M. Posselt, L. Bischoff, D. Grambole and F. Herrmann, Appl. Phys. Lett., 89, 151918 (2006)