The effect of the substrate temperature on extended defects created by hydrogen implantation in germanium

Journal of Applied Physics

Volumn 102, Issue 9, 2007, Pages

  David, M L ^a   Pailloux, F ^a   Babonneau, D ^a   Drouet, M ^a   Barbot, J F ^a   Simoen, E ^b   Claeys, C ^b,c  

^a UMR 6630   (France)

^b IMEC   (Belgium)

^c UNIVERSITY OF LEUVEN   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

DEFECTS; GERMANIUM; MICROCRACKS; MICROSTRUCTURE; THERMAL EFFECTS; TRANSMISSION ELECTRON MICROSCOPY; X RAY SCATTERING;

CAVITY CLUSTERS; KINETIC EFFECTS; ROOM TEMPERATURE; SUBSTRATE TEMPERATURE;

ION IMPLANTATION;

EID: 37549052551     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2803715     Document Type: Article

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