Systematics of the giant isotope effect in hydrogen ion blistering of materials

Surface and Coatings Technology

Volumn 201, Issue 19-20 SPEC. ISS., 2007, Pages 8205-8209

  Giguère, Alexandre ^a   Terreault, Bernard ^a  

^a INRS EMT   (Canada)

Author keywords

Hydrogen isotopes; Ion blistering; Semiconductors

Indexed keywords

HYDROGEN ISOTOPES; ION BLISTERING;

CHEMISTRY; CRYSTAL LATTICES; HYDROGEN; ION BOMBARDMENT; ISOTOPES; MONTE CARLO METHODS; RAPID THERMAL ANNEALING; SURFACE MORPHOLOGY; SURFACE TREATMENT;

SEMICONDUCTOR MATERIALS;

CHEMISTRY; CRYSTAL LATTICES; HYDROGEN; ION BOMBARDMENT; ISOTOPES; MONTE CARLO METHODS; RAPID THERMAL ANNEALING; SEMICONDUCTOR MATERIALS; SURFACE MORPHOLOGY; SURFACE TREATMENT;

EID: 34447502071     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2005.11.149     Document Type: Article

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