Damage formation and recovery in temperature helium implanted 4H-SiC

Materials Science and Engineering: B

Volumn 102, Issue 1-3, 2003, Pages 289-292

  Oliviero, E ^a   Tromas, C ^a   Pailloux, F ^a   Declemy A ^a   Beaufort, M F ^a   Blanchard, C ^a   Barbot, J F ^a  

^a UNIVERSITÉ DE POITIERS   (France)

Author keywords

Bubbles; Cavities; Helium implantation; Swelling

Indexed keywords

ANNEALING; BUBBLE FORMATION; COMPUTER SIMULATION; HELIUM; HYDROGEN; ION IMPLANTATION; SWELLING;

DAMAGE FORMATIONS;

SILICON CARBIDE;

EID: 0043013515     PISSN: 09215107     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0921-5107(02)00723-7     Document Type: Conference Paper

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