Investigation of stress-induced (100) platelet formation and surface exfoliation in plasma hydrogenated Si

Applied Physics Letters

Volumn 91, Issue 24, 2007, Pages

  Di, Zengfeng ^a   Wang, Yongqiang ^a   Nastasi, Michael ^a   Rossi, Francois ^b   Lee, Jung Kun ^c   Shao, Lin ^d   Thompson, Phillip E ^e  

^a LOS ALAMOS NATIONAL LABORATORY   (United States)

^b JOINT RESEARCH CENTRE   (Italy)

^c University of Pittsburgh   (United States)

^d Department of Electrical and Computer Engineering   (United States)

^e NAVAL RESEARCH LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPRESSIVE STRESS; HYDROGENATION; NUCLEATION; PLASMAS; SILICON COMPOUNDS;

LAYER EXFOLIATION; PLASMA HYDROGENATION; PLATELET FORMATION;

PLATELETS;

EID: 37149038000     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2822414     Document Type: Article

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