SCOPUS 정보 검색 플랫폼

Journal of Materials Research

Volumn 15, Issue 7, 2000, Pages 1449-1477

Voids in silicon by He implantation: From basic to applications

(3) Raineri, V a Saggio, M b Rimini, E c

a CNR IMETEM (Italy)

b STMICROELECTRONICS (Italy)

c UNIVERSITY OF CATANIA (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

ADSORPTION; ANNEALING; BINDING ENERGY; BUBBLE FORMATION; CONCENTRATION (PROCESS); CRYSTAL IMPURITIES; ELECTRON TRAPS; HELIUM; SEMICONDUCTING SILICON; SUPERSATURATION;

ISOTHERMAL ANNEALING;

ION IMPLANTATION;

EID: 0034236071 PISSN: 08842914 EISSN: None Source Type: Journal
DOI: 10.1557/JMR.2000.0211 Document Type: Review

Times cited : (152)

References (69)

1
- 84996206673
- (1966) Metallurgical Review , vol.11 , pp. 159
- Blackburn, R.¹

2
- 0001939907
- (1985) Radiation Effects , vol.90 , pp. 1
- Donnelly, S.E.¹

3
- 0017600934
- (1977) Radiation Effects , vol.31 , pp. 129
- Reed, D.J.¹

4
- 0021300091
- Ion Implantation and Ion Beam Processing of Materials, edited by G.K. Huber, D.W. Holland, C.R. Clayton, and C.W. White (North-Holland, New York)
- (1984) Mater. Res. Soc. Symp. Proc. , vol.27 , pp. 229-234
- Elliman, R.G.¹ Johnson, S.T.² Short, K.T.³ Williams, J.S.⁴

5
- 0001247032
- (1995) Phys. Rev. B , vol.51 , pp. 9742
- Myers, S.M.¹ Stein, H.J.² Follstaedt, D.M.³

6
- 0001306296
- (1976) Adv. Chem. Ser. , vol.158 , pp. 112
- Das, S.K.¹ Kaminsky, M.²

7
- 0023385402
- (1987) Nucl. Instrum. Methods Phys. Res., Sect. B , vol.27 , pp. 417
- Griffioen, C.C.¹ Evans, J.H.² De Jong, P.C.³ Van Veen, A.⁴

8
- 0000465822
- (1966) J. Appl. Phys. , vol.80 , pp. 3717
- Myers, S.M.¹ Petersen, G.A.² Seager, C.H.³

9
- 4243908177
- (1997) Solid State Phenomena , vol.57-58 , pp. 43
- Raineri, V.¹

10
- 36449002422
- (1995) Appl. Phys. Lett. , vol.66 , pp. 1231
- Wong-Leung, J.¹ Ascheron, C.E.² Petravic, M.³ Elliman, R.G.⁴ Williams, J.S.⁵

11
- 36449000106
- (1995) Appl. Phys. Lett. , vol.66 , pp. 1889
- Mohadjeri, B.¹ Williams, J.S.² Wong-Leung, J.³

12
- 0000375550
- (1995) Nucl. Instrum. Methods Phys. Res., Sect. B , vol.96 , pp. 257
- Overwijk, M.H.F.¹ Politick, J.² De Kruif, R.C.M.³ Zalm, P.C.⁴

13
- 0000286403
- (1998) Phys. Rev. B , vol.57 , pp. 7015
- Myers, S.M.¹ Petersen, G.A.²

14
- 0000032284
- (1996) Appl. Phys. Lett. , vol.69 , pp. 1783
- Raineri, V.¹ Campisano, S.U.²

15
- 0030566443
- (1996) Nucl. Instrum. Methods Phys. Res., Sect. B , vol.120 , pp. 56
- Raineri, V.¹ Campisano, S.U.²

16
- 0001194909
- (1994) Phys. Rev. B , vol.59 , pp. 2458
- Seager, C.H.¹ Myers, S.M.² Anderson, R.A.³ Warren, W.L.⁴ Follstaedt, D.M.⁵

17
- 0006353921
- (1995) J. Appl. Phys. , vol.78 , pp. 3727
- Raineri, V.¹ Fallica, P.G.² Percolla, G.³ Battaglia, A.⁴ Barbagallo, M.⁵ Campisano, S.U.⁶

18
- 0031192180
- (1997) IEEE Electron Device Lett. , vol.18 , pp. 333
- Saggio, M.¹ Raineri, V.² Letor, R.³ Frisina, F.⁴

19
- 0032208013
- (1998) Materials Chemistry and Physics , vol.57 , pp. 1
- Chu, P.K.¹ Cheung, N.W.²

20
- 0001757511
- (1992) Phys. Rev. B , vol.46 , pp. 12806
- Alatalo, M.¹ Puska, M.J.² Nieminen, R.M.³

21
- 0000426691
- (1999) J. Appl. Phys. , vol.85 , pp. 1401
- Corni, F.¹ Calzolari, G.² Frabboni, S.³ Nobili, C.⁴ Ottaviani, G.⁵ Tonini, R.⁶ Cerofolini, G.F.⁷ Leone, D.⁸ Servidori, M.⁹ Brusa, R.S.¹⁰ Karwasz, G.P.¹¹ Tiengo, N.¹² Zecca, A.¹³

22
- 0033556826
- (1999) J. Appl. Phys. , vol.85 , pp. 2390
- Brusa, R.S.¹ Karwasz, G.P.² Tiengo, N.³ Zecca, A.⁴ Corni, F.⁵ Calzolari, G.⁶ Nobili, C.⁷

23
- 0000688469
- (1997) Phys. Rev. B , vol.56 , pp. 7331
- Corni, F.¹ Nobili, C.² Ottaviani, G.³ Tonini, R.⁴ Calzolari, G.⁵ Cerofolini, G.F.⁶ Queirolo, G.⁷

24
- 0001482128
- (1998) J. Appl. Phys. , vol.84 , pp. 4802
- Tonini, R.¹ Corni, F.² Frabboni, S.³ Ottaviani, G.⁴ Cerofolini, G.F.⁵

25
- 0000673116
- (2000) Phys. Rev. B , vol.61 , pp. 937
- Raineri, V.¹ Coffa, S.² Szilágyi, E.³ Gyulal, J.⁴ Rimini, E.⁵

26
- 0003412161
- Pergamon Press, New York
- (1985) The Stopping and Range of Ions in Solids
- Ziegler, J.F.¹ Biersack, J.P.² Littmark, U.³

27
- 0040081173
- (2000) Phy. Rev. B , vol.61 , pp. 10183
- Cerofolini, G.F.¹ Calzolari, G.² Corni, F.³ Frabboni, S.⁴ Nobili, C.⁵ Ottaviani, G.⁶ Tonini, R.⁷

28
- 0000478175
- (1997) Phys. Rev. B , vol.55 , pp. 5037
- Estreicher, S.K.¹ Weber, J.² Derecskei-Kovacs, A.³ Marynick, D.S.⁴

29
- 0004893209
- (1989) Phys. Rep. , vol.176 , pp. 83
- Davis, G.¹

30
- 0023132540
- (1987) J. Phys. C: Solid State Phys. , vol.20 , pp. 191
- Davies, G.¹ Lightowlers, E.C.² Ciedanawaska, Z.F.³

31
- 0017600934
- (1977) Radiation Effects , vol.31 , pp. 129
- Reed, D.J.¹

32
- 0001158740
- (1998) Appl. Phys. Lett. , vol.73 , pp. 3721
- Weldon, M.K.¹ Collot, M.² Chabal, Y.J.³ Venezia, V.C.⁴ Agarwal, A.⁵ Haynes, T.E.⁶ Eaglesham, D.J.⁷ Christman, S.B.⁸ Chaban, E.E.⁹

33
- 0029637854
- (1995) Electron. Lett. , vol.31 , pp. 1201
- Bruel, M.K.¹

34
- 0001080862
- (1997) Appl. Phys. Lett. , vol.71 , pp. 389
- Libertino, S.¹ Benton, J.L.² Jacobson, D.C.³ Eaglesham, D.J.⁴ Poate, J.⁵ Coffa, S.⁶ Fuochi, P.G.⁷ Lavalle, M.⁸

35
- 0033513855
- (1999) Nucl. Instrum. Methods Phys. Res., Sect. B , vol.148 , pp. 247
- Libertino, S.¹ Coffa, S.² Benton, J.L.³ Halliburton, K.⁴ Eaglesham, D.J.⁵

36
- 0000085788
- (1997) J. Appl. Phys. , vol.82 , pp. 120
- Benton, J.L.¹ Libertino, S.² Kringoi, P.³ Eaglesham, D.J.⁴ Poate, J.M.⁵ Coffa, S.⁶

37
- 0032715106
- (1999) Nucl. Instrum. Methods Phys. Res., Sect. B , vol.147 , pp. 298
- Roqueta, F.¹ Grob, A.² Grob, J.J.³ Jerisian, R.⁴ Stoquert, J.P.⁵ Ventura, L.⁶

38
- 0003520215
- Pergamon Press, New York, Chap. X
- (1965) The Theory of Transformation in Metals and Alloys, 1st ed.
- Christion, J.W.¹

39
- 0033556826
- (1999) J. Appl. Phys. , vol.85 , pp. 2390
- Brusa, R.S.¹ Karwasz, G.P.² Tiengo, N.³ Zecca, A.⁴ Corni, F.⁵ Calzolari, G.⁶ Nobili, C.⁷

40
- 0003531591
- McGraw-Hill, New York
- (1968) Theory of Dislocations , pp. 145
- Hirth, J.P.¹ Lothe, J.²

41
- 0005346036
- (1997) J. Appl. Phys. , vol.81 , pp. 6031
- Stolk, P.¹ Gossmann, H.J.² Eaglesham, D.J.³ Jacobson, D.C.⁴ Rafferty, C.S.⁵ Gilmer, G.H.⁶ Jaraiz, M.⁷ Poate, J.M.⁸ Luftman, H.S.⁹ Haynes, T.E.¹⁰

42
- 0002121327
- (1943) Rev. Mod. Phys. , vol.15 , pp. 1
- Chandrasekhar, S.¹

43
- 0020202306
- (1983) Radiation Effects , vol.78 , pp. 245
- Kaletta, D.¹

44
- 0033323031
- IEEE
- (1999) Proc. Ion Implantation Technology 1998 , pp. 130
- Raineri, V.¹ Saggio, M.² Frisina, F.³ Rimini, E.⁴

45
- 36449009105
- (1993) Appl. Phys. Lett. , vol.62 , pp. 1116
- Follstaedt, D.M.¹

46
- 0000163037
- (1993) Phys. Rev. Lett. , vol.70 , pp. 1643
- Eaglesham, D.J.¹ White, A.E.² Feldman, L.C.³ Moriga, N.⁴ Jacobson, D.C.⁵

47
- 33744588032
- (1983) Surf. Sci. , vol.128 , pp. 334
- Heyraud, J.C.¹ Metois, J.J.²

48
- 0003533533
- edited by R.G. Gomer and C.S. Smith (University of Chicago Press, Chicago, IL)
- (1953) Structure and Properties of Solid Surfaces
- Herring, C.¹

49
- 0001421454
- (1901) Z. Kristallogr. Mineral , vol.34 , pp. 449
- Wulff, G.¹

50
- 0032714775
- (1999) Nucl. Instrum. Methods Phys. Res., Sect. B , vol.149 , pp. 292
- Raineri, V.¹ Coffa, S.² Saggio, M.³ Frisina, F.⁴ Rimini, E.⁵

51
- 0028260004
- Materials Synthesis and Processing Using Ion Beams, edited by R.S. Culbertson, O.W. Holland. K.S. Jones. and K. Maex (Pittsburgh, PA)
- (1994) Mater. Res. Soc. Symp. Proc. , vol.316 , pp. 33-38
- Myers, S.M.¹ Follstaedt, D.M.² Bishop, D.M.³

52
- 34250375503
- (1995) Appl. Phys. Lett. , vol.67 , pp. 416
- Wong-Leung, J.¹ Nygren, E.² Williams, J.S.³

53
- 0000275415
- (1995) Nucl. Instrum. Methods Phys. Res., Sect. B , vol.106 , pp. 379
- Myers, S.M.¹ Follstaedt, D.M.² Petersen, G.A.³ Seager, C.H.⁴ Stein, H.J.⁵ Wampler, W.R.⁶

54
- 0001322815
- (1996) J. Appl. Phys. , vol.79 , pp. 1337
- Myers, S.M.¹ Follstaedt, D.M.²

55
- 25344466268
- (1996) Nucl. Instrum. Methods Phys. Res., Sect. B , vol.43 , pp. 120
- Myers, S.M.¹ Petersen, G.A.² Follstaedt, D.M.³ Headley, T.J.⁴ Michael, J.R.⁵ Seager, C.H.⁶

56
- 4243908177
- (1997) Solid State Phenomena , vol.57-58 , pp. 43
- Raineri, V.¹

57
- 0001510348
- (1996) J. Appl. Phys. , vol.80 , pp. 4322
- Cacciato, A.¹ Camalleri, C.M.² Franco, G.³ Rained, V.⁴ Coffa, S.⁵

58
- 0033898952
- (2000) Mater. Sci. Eng. B , vol.73 , pp. 95
- Hoelzl, R.¹ Range, K.J.² Fabry, L.³ Hage, J.⁴ Raineri, V.⁵

59
- 0030271061
- (1996) IEEE Electron Device Lett. , vol.17 , pp. 485
- Lombardo, S.¹ Pinto, A.² Raineri, V.³ Ward, P.⁴ La Rosa, G.⁵ Privitera, G.⁶ Campisano, S.U.⁷

60
- 0042305831
- (1990) Surf. Sci. Rep. , vol.12 , pp. 1
- Himpsel, F.J.¹

61
- 0032289846
- (1998) Solid State Electronics , vol.42 , pp. 2295
- Raineri, V.¹ Saggio, M.² Frisina, F.³ Rimini, E.⁴

62
- 0001044615
- (1996) J. Appl. Phys. , vol.79 , pp. 9012
- Raineri, V.¹ Fallica, G.² Libertino, S.³

63
- 0026994023
- (1992) IEEE Trans. Electron Devices , vol.39 , pp. 2745
- Catania, M.¹ Frisina, F.² Tavolo, N.³ Ferla, G.⁴ Coffa, S.⁵ Campisano, S.U.⁶

64
- 0017504430
- (1977) IEEE Trans. Electron Devices , vol.24 , pp. 685
- Jayant Baliga, B.¹ Sun, E.²

65
- 0022811529
- (1986) IEEE Trans. Electron Devices , vol.33 , pp. 1667
- Mogro-Campero, A.¹ Love, R.P.² Chang, M.F.³ Dyer, R.⁴

66
- 0024767217
- (1989) Solid State Electronics , vol.32 , pp. 1033
- Hallen, A.¹ Bakowsky, M.²

67
- 85021264071
- edited by C.A.T. Salama and R.K. Williams (IEEE, New Jersey)
- (1996) Proc. IPSD'96
- Konishi, Y.¹ Onishi, Y.² Momota, S.³ Sakurai, K.⁴

68
- 0030151921
- (1995) IEEE Trans. Electron Devices , vol.43 , pp. 836
- Coffa, S.¹ Magrì, A.² Frisina, F.³ Privitera, V.⁴

69
- 0009225843
- Silvaco
- (1997) ATLAS User's Guide, Ver. 4.0.3

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.