On the mechanism of the hydrogen-induced exfoliation of silicon

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 15, Issue 4, 1997, Pages 1065-1073

  Weldon, M K ^a   Marsico, V E ^a   Chabal, Y J ^a   Agarwal, A ^a,b   Eaglesham, D J ^a   Sapjeta, J ^a   Brown, W L ^a   Jacobson, D C ^a   Caudano, Y ^a   Christman, S B ^a   Chaban, E E ^a  

^a LUCENT TECHNOLOGIES   (United States)

^b OAK RIDGE NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0342727389     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.589416     Document Type: Article

References (23)

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