Dislocations induced by bubble formation in high energy He implantation in silicon

Journal of Applied Physics

Volumn 89, Issue 10, 2001, Pages 5332-5338

  Oliviero, E ^a   Beaufort, M F ^a   Barbot, J F ^a  

^a UNIVERSITÉ DE POITIERS   (France)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0035873549     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1327289     Document Type: Article

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