Photonic Microsystems: An enabling technology for light deflection and modulation

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5348, Issue , 2004, Pages 7-21

  Schenk, Harald ^a   Wolter, Alexander ^a   Dauderstaedt, Ulrike ^a   Gehner, Andreas ^a   Grueger, Heinrich ^a   Drabe, Christian ^a   Lakner, Hubert ^a  

^a FRAUNHOFER INSTITUTE FOR PHOTONIC MICROSYSTEMS   (Germany)

Author keywords

MEMS; Micro mirror; Micro scanner; Mirror arrays; Optical MEMS; Photonic Microsystems; SLM

Indexed keywords

ARRAYS; BANDWIDTH; DIFFRACTION GRATINGS; DISPLAY DEVICES; LASER BEAMS; LIGHT MODULATION; MICROELECTROMECHANICAL DEVICES; MIRRORS; PHASE MODULATION; PRODUCT DEVELOPMENT; PROJECTION SCREENS; SCANNING;

MICRO MIRRORS; MIRROR ARRAYS; OPTICAL MEMS; PHOTONIC MICROSYSTEMS;

MICROOPTICS;

EID: 2142781645     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.523948     Document Type: Conference Paper

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