Assembly and testing of a grating based electrostatic comb-drive visible micro-spectrometer

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4985, Issue , 2003, Pages 152-159

  Heaton, Larry C ^a   Fisher, Jeff A ^a   Kranz, Michael ^a  

^a Stanley Associates Inc   (United States)

Author keywords

Actuator; Electrostatic; MEMS; Micro Optics; MOEMS; Silicon on Insulator (SOI); Spectrometer

Indexed keywords

MICROACTUATORS; MICROELECTROMECHANICAL DEVICES; MICROOPTICS; PHOTODIODES; PHOTOLITHOGRAPHY; SILICON ON INSULATOR TECHNOLOGY; UNMANNED VEHICLES;

MICROSPECTROMETERS;

SPECTROMETERS;

EID: 0038057632     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.477809     Document Type: Conference Paper

References (14)

1. Antreasyan, A., Napholtz, S. G., Wilt D. P., and Garbinski, P. A., "Monolithic Integration of InGaAsP/InP Semiconductor Lasers Using the Stop-Cleaving Technique," IEEE Journal of Quantum Electronics, vol. QE-22, no.7, July 1986, pp. 1064-1072.
2. Comtois, J. H., and Bright, V. M., "Surface Micromachined Polysilicon Thermal Actuator Arrays and Applications," Proceedings, Solid-State Sensor and Actuator Workshop, Hilton Head Island, SC, June, 1996 pp. 147-177.
3. Constant, M., Boussekey, L., Decoster, D., and Vilcot, J. P., "Use of GaAs High-Gain Photoconductors as New Detectors in Spectroscopic Systems," Electronics Letters, vol.24, no. 16, August, 1988, pp. 141-147.
4. Cremer, C., Emeis, N., Sceir, M., Heise, G., Ebbinghaus, G., and Stoll, L., "Grating Spectrograph with Photodiode Array in InGaAsP/InGaAs/InP," IEEE Photonics Technology Letters, vol. 4, no. 1, January, 1992, pp. 108-110.
5. Goldman, D. S., White, P. L., and Anheier, N. C., "Miniaturized Spectrometer Employing Planar Waveguides and Grating Couplers for Chemical Analysis," Applied Optics, vol.29, no. 31, November, 1990, pp. 4583-4589.
6. J. B. Sampsell, "The digital micromirror device and its application to projection displays," Transducers, Yokohama Japan, pp. 24-27.
7. th IEEE International Conference on Micro Electro Mechanical Systems, pp. 721-726, Miyazaki, Japan, 2000.1.23-27.
8. Kranz M., Fenner R., Dean R., Schutz N., and Garrison H., "Micro-Packaging of COTS MEMS for Remote Monitoring Systems,", Range Commanders Council Twentieth Transducer Workshop, Dayton, OH, June 19, 2002.
9. Kranz M., Hudson T., Ashley P., Ruffin P., Burgett S., Temmen M., Tuck J., "A Single Layer Silicon-on-Insulator MEMS Gyroscope For Wide Dynamic Range And Harsh Environment Applications," Proceedings, SPIE Micromachining and Microfabrication, San Francisco, CA, October 22, 2001.
10. Kranz M., Legowik R., Bowers W., Dean R., "Micro-Packaging of COTS MEMS for Remote Monitoring Systems," 3rd Advanced Technology Workshop on Packaging of MEMS and Related Micro Integrated Nano Systems, Scotts Valley, CA, November 8, 2001.
11. Kwa, T. A., Sarro, P. M., and Woffenbuttel, R. F., "Backside-Illuminated Silicon Photodiode Array for an Integrated Spectrometer," IEEE Transactions on Electron Devices, vol. 44, no. 5, May, 1997, pp. 761-765.
12. M. C. Wu, et al, "Micromachined free space integrated optics," Proceedings, SPIE Integrated Optics and Microstructures II. San Francisco, CA, July 1994, pp. 40-51.
13. M. Ikeda, et al, "Two dimensional silicon micromachined optical scanner integrated with photodetector and piezoresist," Transducers '95, Stockholm Sweden, 1995, v.1, pp. 293-296.
14. Yee, G. M., Hing, P. A., Maluf, N. I., and Kovacs, G. T. A., "Miniaturized Spectrometers for Biochemical Analysis," Proceedings, Solid-State Sensor and Actuator Workshop, Hilton head Island, SC, June, 1996, pp. 64-67.