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Volumn 13, Issue 3, 2003, Pages 474-481

Micromirror array for protein micro array fabrication

Author keywords

[No Author keywords available]

Indexed keywords

DISPLAY DEVICES; ELECTRODES; PHOTORESISTS; PHOTOSYNTHESIS; PROJECTION SYSTEMS; PROTEINS; SEMICONDUCTOR DEVICE MANUFACTURE; SEMICONDUCTOR DEVICE MODELS;

EID: 0038353918     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/13/3/318     Document Type: Article
Times cited : (18)

References (14)
  • 1
    • 0027816551 scopus 로고
    • Current status of digital micromirror device (DMD) for projection television applications
    • Hornbeck L J 1993 Current status of digital micromirror device (DMD) for projection television applications Tech. Digest of IEEE IEDM'93 pp 381-4
    • (1993) Tech. Digest of IEEE IEDM'93 , pp. 381-384
    • Hornbeck, L.J.1
  • 2
    • 4243615555 scopus 로고    scopus 로고
    • Digital light processing for high-brightness, high-resolution applications
    • Hornbeck L J 1997 Digital light processing for high-brightness, high-resolution applications Tech. Digest of Electronic Imaging'97
    • (1997) Tech. Digest of Electronic Imaging'97
    • Hornbeck, L.J.1
  • 3
    • 0027702636 scopus 로고
    • Mirrors on a chip
    • Younse J M 1993 Mirrors on a chip IEEE Spectr. 30 27-31
    • (1993) IEEE Spectr. , vol.30 , pp. 27-31
    • Younse, J.M.1
  • 4
    • 0030407468 scopus 로고    scopus 로고
    • Electrostatic micro torsion mirrors for an optical switch matrix
    • Toshiyoshi H and Fujita H 1996 Electrostatic micro torsion mirrors for an optical switch matrix J. IEEE Microelectromech. Syst. 5 231-7
    • (1996) J. IEEE Microelectromech. Syst. , vol.5 , pp. 231-237
    • Toshiyoshi, H.1    Fujita, H.2
  • 8
    • 0038694200 scopus 로고    scopus 로고
    • Webpage http://www.febit.com
  • 9
    • 0038355828 scopus 로고    scopus 로고
    • Webpage http://www.xeotron.com
  • 10
    • 0028425212 scopus 로고
    • Mechanical and optical properties of surface micromachined torsional mirrors in silicon, polysilicon and aluminum
    • Jaecklin V P, Linder C, Brugger J, de Rooij N F, Moret J M and Vuilleumier R 1994 Mechanical and optical properties of surface micromachined torsional mirrors in silicon, polysilicon and aluminum Sensors Actuators A 43 269-75
    • (1994) Sensors Actuators A , vol.43 , pp. 269-275
    • Jaecklin, V.P.1    Linder, C.2    Brugger, J.3    De Rooij, N.F.4    Moret, J.M.5    Vuilleumier, R.6
  • 11
    • 0012566804 scopus 로고    scopus 로고
    • Uniformity improvement of micromirror array for reliable working performance as an optical modulator in the maskless photolithography system
    • Lee K N and Kim Y K 2001 Uniformity improvement of micromirror array for reliable working performance as an optical modulator in the maskless photolithography system J. Semicond. Technol. Sci. 1 132-9
    • (2001) J. Semicond. Technol. Sci. , vol.1 , pp. 132-139
    • Lee, K.N.1    Kim, Y.K.2
  • 12
    • 0032297017 scopus 로고    scopus 로고
    • Measurements of a fabricated micro mirror using a lateral-effect position-sensitive photodiode
    • Chung S W and Kim Y K 1998 Measurements of a fabricated micro mirror using a lateral-effect position-sensitive photodiode Trans. Ind. Electron. 45 861-5
    • (1998) Trans. Ind. Electron. , vol.45 , pp. 861-865
    • Chung, S.W.1    Kim, Y.K.2
  • 13
    • 0037233707 scopus 로고    scopus 로고
    • Protein patterning by virtual mask photolithography using micromirror array
    • Lee K N, Shin D S, Lee Y S and Kim Y K 2003 Protein patterning by virtual mask photolithography using micromirror array J. Micromech. Microeng. 13 18-25
    • (2003) J. Micromech. Microeng. , vol.13 , pp. 18-25
    • Lee, K.N.1    Shin, D.S.2    Lee, Y.S.3    Kim, Y.K.4


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.